Problem headway2 SNF 2008-11-07 17:00:23: vacuum interlock problem?

mkerby at snf.stanford.edu mkerby at snf.stanford.edu
Fri Nov 7 17:00:23 PST 2008


without chuck, doesn't spin.  ANY chuck, no wafer and it spins. Not a resist clog. vacuum is still active (finger test) and wafers adhere so still was able to use it without a problem




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