Problem headway2 SNF 2008-11-07 17:00:23: vacuum interlock problem?

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 10 08:19:33 PST 2008


Inspected Solenoid  and vacuum hoses & fittings, everything
 looks normal the reason why the system was having 
problems was because someone Use excesive amount of
SU8 and that sticks to the chucks make them rotate without
a wafer, I cleaned up the system and the Spindle shaft,
tested , ready to use, 




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