Problem headway2 SNF 2008-11-26 10:56:53: Chuck rotating by itself

kocabas at snf.stanford.edu kocabas at snf.stanford.edu
Wed Nov 26 10:56:54 PST 2008


The chuck is rotating by itself even when there is no wafer. Line is possibly clogged. Mario is looking into it.
Ekin




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