From chen0622 at snf.stanford.edu Mon Oct 6 11:28:06 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 6 Oct 2008 11:28:06 -0700 Subject: Problem headway2 SNF 2008-10-06 11:28:05: unknown chemical on bench Message-ID: Before I started using the tool, there are two beakers with unknown chemical inside on the bench. From chen0622 at snf.stanford.edu Mon Oct 6 12:55:32 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 6 Oct 2008 12:55:32 -0700 Subject: Problem headway2 SNF 2008-10-06 12:55:32: I had already seen those two beaker of chemicals around 7:40 AM in the morning Message-ID: From vilanova at snf.stanford.edu Mon Oct 6 15:13:30 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Oct 2008 15:13:30 -0700 Subject: Problem headway2 SNF 2008-10-06 11:28:05: unknown chemical on bench Message-ID: I found 2 beakers full of resist , there was a blue paper next to them but there was nothing written on, So I beleive it was Gasper the friendly ghost again!, I cleaned up the mess. From vilanova at snf.stanford.edu Mon Oct 6 15:13:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Oct 2008 15:13:41 -0700 Subject: Problem headway2 SNF 2008-10-06 12:55:32: I had already seen those two beaker of chemicals around 7:40 AM in the morning Message-ID: found 2 beakers full of resist , there was a blue paper next to them but there was nothing written on, So I beleive it was Gasper the friendly ghost again!, I cleaned up the mess. From vilanova at snf.stanford.edu Thu Oct 9 07:57:18 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Oct 2008 07:57:18 -0700 Subject: Shutdown headway2 SNF 2008-10-09 07:57:17: Preventive maintenance in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Oct 9 08:35:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Oct 2008 08:35:17 -0700 Subject: Shutdown headway2 SNF 2008-10-09 07:57:17: Preventive maintenance in progress.... Message-ID: preventive maintenance Completed, tested good to use. From vilanova at snf.stanford.edu Fri Oct 17 08:25:04 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Oct 2008 08:25:04 -0700 Subject: Comment headway2 SNF 2008-10-17 08:25:01: Cleaning and repairing CHucks Message-ID: I just finished cleaning and replacing the white teflon Inserts and also the orings On all of the chucks. From jwc at snf.stanford.edu Tue Oct 21 11:46:41 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 21 Oct 2008 11:46:41 -0700 Subject: Problem headway2 SNF 2008-10-21 11:46:40: bench contaminated with LOL and red resist from last evening. Message-ID: GREETINGS: HEADWAY bench WAS FOUND SEVERELY contaminated with LOL and red resist from last evening. we attempted to clean the deck but were unsuccessful as it has cross linked. All LOL users are advised to monitor this or be remoeved from access to this bench. James Conway From vilanova at snf.stanford.edu Tue Oct 21 14:38:22 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Oct 2008 14:38:22 -0700 Subject: Problem headway2 SNF 2008-10-21 11:46:40: bench contaminated with LOL and red resist from last evening. Message-ID: CLEANED. :-) From jwc at snf.stanford.edu Tue Oct 28 11:25:02 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:25:02 -0700 Subject: Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks Message-ID: From jwc at snf.stanford.edu Tue Oct 28 11:30:22 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:30:22 -0700 Subject: Shutdown headway2 SNF 2008-10-28 11:30:21: poor wafer tack vacuum Message-ID: tosses and breaks the wafer every time... before committing to a real wafer this issue needs to be addressed. Need - 28 mm Hg vacuum to secure any piece. How about considering adding an accumulator tank to this setup?!! As I am on thr last layer of 7 layers on my wafer -- I don't wish to risk this wafer until this is repaired. Lost time and $$$ income to SNF! JWC From vilanova at snf.stanford.edu Tue Oct 28 14:34:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Oct 2008 14:34:49 -0700 Subject: Shutdown headway2 SNF 2008-10-28 11:30:21: poor wafer tack vacuum Message-ID: Cleaned the entire system , spindle ,shaft /solenoid, vacuum fittings, replaced vacuum hose , I found A chunck of old resist in the solenoid Valve, we Jst have to clean it up more often since this machine is heavily use. From vilanova at snf.stanford.edu Tue Oct 28 14:35:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Oct 2008 14:35:26 -0700 Subject: Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks Message-ID: Cleaned the entire system , spindle ,shaft /solenoid, vacuum fittings, replaced vacuum hose ,CYcled wafers , ok to use I found A chunck of old resist in the solenoid Valve, we Just have to clean it up more often since this machine is heavily use. From jwc at snf.stanford.edu Wed Oct 29 11:19:50 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 29 Oct 2008 11:19:50 -0700 Subject: Shutdown headway2 SNF 2008-10-29 11:19:49: spindle clogged with resist Message-ID: headway system does not pass intial no wafer check spindle spins on pressing pedal with no wafer on top. more time lost JWC From gsosa at snf.stanford.edu Wed Oct 29 12:58:40 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Oct 2008 12:58:40 -0700 Subject: Shutdown headway2 SNF 2008-10-29 11:19:49: spindle clogged with resist Message-ID: Inspected solinoid plunger, hoses and spindle all are clean and unobstructed. Installed a vacuum guage tee'd into vacuum supply hose for diagnostic purposes. Supplied vacuum to spindle:24" Hg, Open spindle vacuum: 11" Hg, Vacuum sensor setpoint: 18 - 19 " Hg. Tried Go / No Go test. All looks good. User tested out OK.