Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks
jwc at snf.stanford.edu
jwc at snf.stanford.edu
Tue Oct 28 11:25:02 PDT 2008
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Problem headway2 SNF 2008-10-21 11:46:40: bench contaminated with LOL and red resist from last evening.
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Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks
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Problem headway2 SNF 2008-10-21 11:46:40: bench contaminated with LOL and red resist from last evening.
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Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks
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