Shutdown headway2 SNF 2008-10-28 11:30:21: poor wafer tack vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 28 14:34:49 PDT 2008


Cleaned the entire system , spindle ,shaft /solenoid, vacuum 
fittings, replaced  vacuum hose , I found A chunck of old resist
in the solenoid Valve, we  Jst have to clean it up more often
since this machine is heavily use. 




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