Problem headway2 SNF 2008-10-28 11:25:01: insufficent vacuum for holding wafers to chucks

vilanova at vilanova at
Tue Oct 28 14:35:26 PDT 2008

Cleaned the entire system , spindle ,shaft /solenoid, vacuum 
fittings, replaced  vacuum hose ,CYcled wafers , ok to use  I
 found A chunck of old resist
in the solenoid Valve, we  Just have to clean it up more often
since this machine is heavily use. 

More information about the headway2-pcs mailing list