Shutdown headway2 SNF 2008-10-29 11:19:49: spindle clogged with resist

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Oct 29 11:19:50 PDT 2008


headway system does not pass intial no wafer check 
spindle spins on pressing pedal with no wafer on top.
more time lost
JWC




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