Hello all, Farid was kind enough to send me the data he collected on 220-3 on headway today, in case you like to run the resist on headway here it is.... Hello Mahnaz, Here's 3-4 um resist (SPR220-3) test thickness at Headway. RPM Thickness Bake 3000 2.7 um 200 sec hot plate 90C 2000 3.2 um 200 sec hot plate 90C 1600 3.7 um 200 sec hot plate 90C Regards, Farid Zuberi