From hktran at snf.stanford.edu Thu Jul 2 07:20:16 2009 From: hktran at snf.stanford.edu (hktran at snf.stanford.edu) Date: Thu, 2 Jul 2009 07:20:16 -0700 Subject: Shutdown headway2 SNF 2009-07-02 07:20:15: Headway not spinning! Message-ID: Headway not spinning at all with vacuum on. Possible motor failure. From vilanova at snf.stanford.edu Thu Jul 2 07:35:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Jul 2009 07:35:22 -0700 Subject: Shutdown headway2 SNF 2009-07-02 07:20:15: Headway not spinning! Message-ID: The Spindle was found full of some chemical Other than resist ) this made the fuse to blow Again, Cleaned spindle and replaced Fuse, tested, Ok to use. From vilanova at snf.stanford.edu Thu Jul 2 07:35:35 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Jul 2009 07:35:35 -0700 Subject: Comment headway2 SNF 2009-06-16 11:37:57: extremely dirty Message-ID: The Spindle was found full of some chemical Other than resist ) this made the fuse to blow Again, Cleaned spindle and replaced Fuse, tested, Ok to use. From helencxy at snf.stanford.edu Sat Jul 11 15:35:45 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Sat, 11 Jul 2009 15:35:45 -0700 Subject: Problem headway2 SNF 2009-07-11 15:35:44: No spinning. Fuse problem again? Message-ID: Tried several chuck, different pieces sizes...no spin at all. Maybe it's the fuse problem all over agin. From vilanova at snf.stanford.edu Mon Jul 13 08:13:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jul 2009 08:13:22 -0700 Subject: Problem headway2 SNF 2009-07-11 15:35:44: No spinning. Fuse problem again? Message-ID: replaced bad fuse, cleaned solenoid , and tested, Ok to use. From khoang at snf.stanford.edu Mon Jul 13 11:40:57 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Mon, 13 Jul 2009 11:40:57 -0700 Subject: Comment headway2 SNF 2009-07-13 11:40:56: so dirty Message-ID: a lot of resist around the spin coater From vilanova at snf.stanford.edu Mon Jul 13 14:51:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jul 2009 14:51:51 -0700 Subject: Comment headway2 SNF 2009-07-13 11:40:56: so dirty Message-ID: cleaned !!! From fanpy at snf.stanford.edu Mon Jul 13 15:47:46 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Mon, 13 Jul 2009 15:47:46 -0700 Subject: Shutdown headway2 SNF 2009-07-13 15:47:45: no spinning again Message-ID: James suspects the motor is dead. From vilanova at snf.stanford.edu Tue Jul 14 11:58:44 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Jul 2009 11:58:44 -0700 Subject: Shutdown headway2 SNF 2009-07-13 15:47:45: no spinning again Message-ID: Monthly Pm Completed, cleaned spindle shaft, Fittings Vacuum Lines ,resist acumulation container, tested , ok to use. From vilanova at snf.stanford.edu Thu Jul 23 08:20:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jul 2009 08:20:13 -0700 Subject: Comment headway2 SNF 2009-07-23 08:20:13: where is the 3" small Chuck??? Message-ID: I just put out another small chucks for pieces because the 3" small chuck for pieces is missing , if someone has it please return it ASAP we cannot be Missing chucks every other week , I Also replaced the Small 3612 Resist Quart Bottle that got broken yesterday Afternoon. All the Small Quartz Bottle are Full and ready to use. From vilanova at snf.stanford.edu Fri Jul 24 08:55:36 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Jul 2009 08:55:36 -0700 Subject: Comment headway2 SNF 2009-07-24 08:55:36: I FOund the chucks!!!! Message-ID: FOund chucks cleaned them and replaced Orings. From tdo at snf.stanford.edu Mon Jul 27 17:52:28 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Mon, 27 Jul 2009 17:52:28 -0700 Subject: Problem headway2 SNF 2009-07-27 17:52:28: poor vacuum Message-ID: spins without chuck From vilanova at snf.stanford.edu Tue Jul 28 07:36:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Jul 2009 07:36:54 -0700 Subject: Problem headway2 SNF 2009-07-27 17:52:28: poor vacuum Message-ID: checked system and vacuum is pretty Good , Cycled wafers And I couldnt repeat the problem , Sometimes is not a vacuum Issue but the chuck Oring that is dirty ,It should be clean with acetone before and after use.