Problem headway2 SNF 2009-07-27 17:52:28: poor vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 28 07:36:54 PDT 2009


checked system and vacuum is pretty Good , Cycled wafers
And I couldnt repeat the problem , Sometimes is not  a vacuum Issue 
but the chuck Oring that is dirty ,It should be clean with acetone before 
and after use. 




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