From khoang at snf.stanford.edu Mon May 4 14:46:44 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Mon, 4 May 2009 14:46:44 -0700 Subject: Problem headway2 SNF 2009-05-04 14:46:44: unable to spin Message-ID: It can not spin! From gsosa at snf.stanford.edu Mon May 4 15:43:55 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 May 2009 15:43:55 -0700 Subject: Shutdown headway2 SNF 2009-05-04 15:43:54: spindle frozen Message-ID: The spindle is siezed up. Will need to dis-assemble and clean. From gsosa at snf.stanford.edu Mon May 4 17:54:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 May 2009 17:54:35 -0700 Subject: Problem headway2 SNF 2009-05-04 14:46:44: unable to spin Message-ID: Dis-assembled and cleaned spindle shaft, shaft bearings and feedthrough. Checked solinoid and vacuum sensor-OK. Tested operation- All OK. From gsosa at snf.stanford.edu Mon May 4 17:54:41 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 May 2009 17:54:41 -0700 Subject: Shutdown headway2 SNF 2009-05-04 15:43:54: spindle frozen Message-ID: Dis-assembled and cleaned spindle shaft, shaft bearings and feedthrough. Checked solinoid and vacuum sensor-OK. Tested operation- All OK. From kcbalram at snf.stanford.edu Thu May 14 20:33:42 2009 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Thu, 14 May 2009 20:33:42 -0700 Subject: Comment headway2 SNF 2009-05-14 20:33:42: chuck spins without sample on it..... Message-ID: From faridz at snf.stanford.edu Mon May 18 14:58:13 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 18 May 2009 14:58:13 -0700 Subject: Problem headway2 SNF 2009-05-18 14:58:12: vacuum lost Message-ID: can process wafers vacuum lost.... please check From jwc at snf.stanford.edu Mon May 18 15:05:00 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 18 May 2009 15:05:00 -0700 Subject: Problem headway2 SNF 2009-05-18 15:05:00: poor tack vacuum -- spidle clogged with resist Message-ID: User Faridz reports poor tack vacuum onm headway spinner. Tried to clear and clean but cannot resume vacuum for wafer holddown. JWC From faridz at snf.stanford.edu Mon May 18 15:54:12 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 18 May 2009 15:54:12 -0700 Subject: Problem headway2 SNF 2009-05-18 15:54:11: Message-ID: From faridz at snf.stanford.edu Mon May 18 15:55:57 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 18 May 2009 15:55:57 -0700 Subject: Shutdown headway2 SNF 2009-05-18 15:55:56: spin motor doesnt work Message-ID: James and Jim confirm the problem vacuum seems okay but motor doesnt spin. unable top process any wafers. From vilanova at snf.stanford.edu Tue May 19 06:12:48 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:12:48 -0700 Subject: Shutdown headway2 SNF 2009-05-18 15:55:56: spin motor doesnt work Message-ID: replaced Blown Fuse. Tested , Ok to use. From vilanova at snf.stanford.edu Tue May 19 06:12:56 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:12:56 -0700 Subject: Problem headway2 SNF 2009-05-18 14:58:12: vacuum lost Message-ID: replaced Blown Fuse. Tested , Ok to use. From vilanova at snf.stanford.edu Tue May 19 06:13:03 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:13:03 -0700 Subject: Comment headway2 SNF 2009-05-14 20:33:42: chuck spins without sample on it..... Message-ID: replaced Blown Fuse. Tested , Ok to use. From vilanova at snf.stanford.edu Tue May 19 06:13:09 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:13:09 -0700 Subject: Problem headway2 SNF 2009-05-18 15:05:00: poor tack vacuum -- spidle clogged with resist Message-ID: replaced Blown Fuse. Tested , Ok to use. From vilanova at snf.stanford.edu Tue May 19 06:13:15 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:13:15 -0700 Subject: Problem headway2 SNF 2009-05-18 15:54:11: Message-ID: From vilanova at snf.stanford.edu Tue May 19 06:17:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:17:21 -0700 Subject: Comment headway2 SNF 2009-05-19 06:17:20: clean the chuck before Use them Message-ID: Clean the chucks before Use them , One of the reasons why the Spindle Doesnt work sometimes is because the White Insert is full of resist, clean the chucks before and after use. From jwc at snf.stanford.edu Tue May 19 11:48:46 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 May 2009 11:48:46 -0700 Subject: Problem headway2 SNF 2009-05-19 11:48:46: LOL found all over the bench and cross linked Message-ID: PREVIOUS USERS LEFT THIS BENCH CONTAMINATED WITH BROKEN WAFER PIECES AND ALL SORTS OF RESIST TRACES ON DECKS. CLEANED UP IN ACETONE AND METHANOL BUT WILL NEED TO HAVE THIS BENCHED STRIPPED AND CLEANED BY THESE USERS WHOM ARE NOMINATED FOR COMMUNITY SERVICE. JWC From vilanova at snf.stanford.edu Wed May 20 07:06:56 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 May 2009 07:06:56 -0700 Subject: Problem headway2 SNF 2009-05-19 11:48:46: LOL found all over the bench and cross linked Message-ID: I moved this message to comment, From vilanova at snf.stanford.edu Wed May 20 07:07:40 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 May 2009 07:07:40 -0700 Subject: Comment headway2 SNF 2009-05-20 07:07:40: Someone Left a big mess over headway James Conway Cleaned it up . Message-ID: From gsosa at snf.stanford.edu Fri May 22 14:29:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 May 2009 14:29:15 -0700 Subject: Comment headway2 SNF 2009-05-22 14:29:15: Developer is here Message-ID: There is developer now in the chemical cabinets for manual use. From xzhuan1 at snf.stanford.edu Fri May 22 16:46:28 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 22 May 2009 16:46:28 -0700 Subject: Problem headway2 SNF 2009-05-22 16:46:28: chuck won't spin Message-ID: Previous users encountered the same problem before the staff fixed it by replacing the fuse. It's likely the fuse is blown again. From ericp at snf.stanford.edu Sat May 23 02:10:03 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 23 May 2009 02:10:03 -0700 Subject: Comment headway2 SNF 2009-05-23 02:10:02: spinning now, but spindle is tight Message-ID: Fuse blown, probably becuse spindle is tight. I tried to clean it to loosen it, but it's still not perfect. It might blow the fuse again. From vilanova at snf.stanford.edu Tue May 26 07:50:52 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:50:52 -0700 Subject: Problem headway2 SNF 2009-05-22 16:46:28: chuck won't spin Message-ID: I noticed some people are running the chucks without the Bottom Oring That cause the Fuse to blown Also the Chucks Insert ( white teflon PArt ) Are Broken I will replace them, Sometimes the shaft and solenoid has Some resist Bulid up that Also causes the Fuses to blow, Please clean the chucks before and after Use. From vilanova at snf.stanford.edu Tue May 26 07:51:00 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:51:00 -0700 Subject: Comment headway2 SNF 2009-05-22 14:29:15: Developer is here Message-ID: I noticed some people are running the chucks without the Bottom Oring That cause the Fuse to blown Also the Chucks Insert ( white teflon PArt ) Are Broken I will replace them, Sometimes the shaft and solenoid has Some resist Bulid up that Also causes the Fuses to blow, Please clean the chucks before and after Use. From vilanova at snf.stanford.edu Tue May 26 07:51:05 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:51:05 -0700 Subject: Comment headway2 SNF 2009-05-23 02:10:02: spinning now, but spindle is tight Message-ID: I noticed some people are running the chucks without the Bottom Oring That cause the Fuse to blown Also the Chucks Insert ( white teflon PArt ) Are Broken I will replace them, Sometimes the shaft and solenoid has Some resist Bulid up that Also causes the Fuses to blow, Please clean the chucks before and after Use. From vilanova at snf.stanford.edu Tue May 26 07:51:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:51:13 -0700 Subject: Comment headway2 SNF 2009-05-20 07:07:40: Someone Left a big mess over headway James Conway Cleaned it up . Message-ID: I noticed some people are running the chucks without the Bottom Oring That cause the Fuse to blown Also the Chucks Insert ( white teflon PArt ) Are Broken I will replace them, Sometimes the shaft and solenoid has Some resist Bulid up that Also causes the Fuses to blow, Please clean the chucks before and after Use. From vilanova at snf.stanford.edu Tue May 26 13:37:06 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 13:37:06 -0700 Subject: Comment headway2 SNF 2009-05-26 13:37:05: cleaned chucks Message-ID: I cleaned all the chucks and I 've replaced All of the Orings ( In and out) I also replaced all of the White Teflon Inserts Please be good to them and clean them after every Use. From vilanova at snf.stanford.edu Fri May 29 07:54:06 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 May 2009 07:54:06 -0700 Subject: Shutdown headway2 SNF 2009-05-29 07:54:05: Monthly Pm in progress........ Message-ID: From vilanova at snf.stanford.edu Fri May 29 11:06:20 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 May 2009 11:06:20 -0700 Subject: Shutdown headway2 SNF 2009-05-29 07:54:05: Monthly Pm in progress........ Message-ID: MOnthly PM Cpompleted , replaced defective motor cleaned Entire System and tested , Ok to use. From xutian at snf.stanford.edu Sun May 31 13:17:38 2009 From: xutian at snf.stanford.edu (xutian at snf.stanford.edu) Date: Sun, 31 May 2009 13:17:38 -0700 Subject: Problem headway2 SNF 2009-05-31 13:17:37: Doesn't spin Message-ID: