Problem headway2 SNF 2009-05-18 14:58:12: vacuum lost
faridz at snf.stanford.edu
faridz at snf.stanford.edu
Mon May 18 14:58:13 PDT 2009
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Comment headway2 SNF 2009-05-14 20:33:42: chuck spins without sample on it.....
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Problem headway2 SNF 2009-05-18 14:58:12: vacuum lost
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can process wafers vacuum lost.... please check
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Comment headway2 SNF 2009-05-14 20:33:42: chuck spins without sample on it.....
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Problem headway2 SNF 2009-05-18 14:58:12: vacuum lost
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