Problem headway2 SNF 2009-05-18 15:05:00: poor tack vacuum -- spidle clogged with resist

jwc at snf.stanford.edu jwc at snf.stanford.edu
Mon May 18 15:05:00 PDT 2009


User Faridz reports poor tack vacuum onm headway spinner.
Tried to clear and clean but cannot resume vacuum for wafer holddown.
JWC




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