From ryw at snf.stanford.edu Sun Nov 8 10:51:35 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sun, 8 Nov 2009 10:51:35 -0800 Subject: Problem headway2 SNF 2009-11-08 10:51:34: Message-ID: From ryw at snf.stanford.edu Sun Nov 8 10:53:58 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sun, 8 Nov 2009 10:53:58 -0800 Subject: Comment headway2 SNF 2009-11-08 10:53:57: headway head doesn't spin Message-ID: vaccum is ok, but the head doesn't spin. it's not smooth to rotate it by hand neither. From svo at snf.stanford.edu Sun Nov 8 11:27:13 2009 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 8 Nov 2009 11:27:13 -0800 Subject: Problem headway2 SNF 2009-11-08 11:27:12: head way does not spin. same as above Message-ID: From jennyhu at snf.stanford.edu Sun Nov 8 14:53:49 2009 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Sun, 8 Nov 2009 14:53:49 -0800 Subject: Problem headway2 SNF 2009-11-08 14:53:49: Unable to spin Message-ID: The vacuum seems okay, but the chuck cannot rotate. There was a lot of resist on the aluminum underside of the headway cover from previous users. Thought it might be photoresist or LOL2000 causing the chuck to be stuck, so tried to clean with acetone and MF26. Unfortunately, it didn't help. From gth at snf.stanford.edu Mon Nov 9 02:09:52 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 9 Nov 2009 02:09:52 -0800 Subject: Shutdown headway2 SNF 2009-11-09 02:09:52: chuck does not move. Message-ID: Is it recommended to try Acretone or Developer to clean the vaccum hole ? From vilanova at snf.stanford.edu Mon Nov 9 11:35:53 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 11:35:53 -0800 Subject: Shutdown headway2 SNF 2009-11-09 02:09:52: chuck does not move. Message-ID: Replaced MOtor, Found The System Full of Liquids ( chemicals ) YOURE NOT ALLOWED TO USE ANY CHEMICALS IN OR ON THE HEADWAY SHAFT , IF THE SYSTEM DOESNT WORK SHUT IT DOWN oN CORAL AND WE WILL TAKE CARE OF IT . Replced Motor, fittings and vacuum hoses, cleaned bench ( in and out ) cleaned catch cup and replaced Plastic Teflon Covers, cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Nov 9 11:36:05 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 11:36:05 -0800 Subject: Problem headway2 SNF 2009-11-08 10:51:34: Message-ID: Replaced MOtor, Found The System Full of Liquids ( chemicals ) YOURE NOT ALLOWED TO USE ANY CHEMICALS IN OR ON THE HEADWAY SHAFT , IF THE SYSTEM DOESNT WORK SHUT IT DOWN oN CORAL AND WE WILL TAKE CARE OF IT . Replced Motor, fittings and vacuum hoses, cleaned bench ( in and out ) cleaned catch cup and replaced Plastic Teflon Covers, cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Nov 9 11:36:15 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 11:36:15 -0800 Subject: Comment headway2 SNF 2009-11-08 10:53:57: headway head doesn't spin Message-ID: Replaced MOtor, Found The System Full of Liquids ( chemicals ) YOURE NOT ALLOWED TO USE ANY CHEMICALS IN OR ON THE HEADWAY SHAFT , IF THE SYSTEM DOESNT WORK SHUT IT DOWN oN CORAL AND WE WILL TAKE CARE OF IT . Replced Motor, fittings and vacuum hoses, cleaned bench ( in and out ) cleaned catch cup and replaced Plastic Teflon Covers, cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Nov 9 11:36:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 11:36:21 -0800 Subject: Problem headway2 SNF 2009-11-08 11:27:12: head way does not spin. same as above Message-ID: Replaced MOtor, Found The System Full of Liquids ( chemicals ) YOURE NOT ALLOWED TO USE ANY CHEMICALS IN OR ON THE HEADWAY SHAFT , IF THE SYSTEM DOESNT WORK SHUT IT DOWN oN CORAL AND WE WILL TAKE CARE OF IT . Replced Motor, fittings and vacuum hoses, cleaned bench ( in and out ) cleaned catch cup and replaced Plastic Teflon Covers, cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Nov 9 11:36:30 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 11:36:30 -0800 Subject: Problem headway2 SNF 2009-11-08 14:53:49: Unable to spin Message-ID: Replaced MOtor, Found The System Full of Liquids ( chemicals ) YOURE NOT ALLOWED TO USE ANY CHEMICALS IN OR ON THE HEADWAY SHAFT , IF THE SYSTEM DOESNT WORK SHUT IT DOWN oN CORAL AND WE WILL TAKE CARE OF IT . Replced Motor, fittings and vacuum hoses, cleaned bench ( in and out ) cleaned catch cup and replaced Plastic Teflon Covers, cycled wafers, Ok to use. From jwc at snf.stanford.edu Tue Nov 10 12:20:55 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 10 Nov 2009 12:20:55 -0800 Subject: Comment headway2 SNF 2009-11-10 12:20:54: found spindle clogged Message-ID: coming on the tool we found the spinner contaminated with LOL or Optical resist. The spindle was clogged and the vacuum sense switch was non functional. Disabled USer hktran from tool and she will need to be retrained as this was the third time she had been a previous user when problems arose. Likely a training retraining issue to be addressed with him/her JWC From vilanova at snf.stanford.edu Fri Nov 20 07:45:33 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 Nov 2009 07:45:33 -0800 Subject: Comment headway2 SNF 2009-11-10 12:20:54: found spindle clogged Message-ID: cleared. From nppatil at snf.stanford.edu Fri Nov 27 00:46:25 2009 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Fri, 27 Nov 2009 00:46:25 -0800 Subject: Problem headway2 SNF 2009-11-27 00:46:25: Vacuum does not turn off Message-ID: From svo at snf.stanford.edu Fri Nov 27 15:41:51 2009 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Fri, 27 Nov 2009 15:41:51 -0800 Subject: Problem headway2 SNF 2009-11-27 15:41:50: headway stopped spinning! Message-ID: was able to spin lol but then it just stopped! tried another chuck but still does not work. related to previous user's comment From svo at snf.stanford.edu Fri Nov 27 16:05:53 2009 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Fri, 27 Nov 2009 16:05:53 -0800 Subject: Shutdown headway2 SNF 2009-11-27 16:05:52: does not spin for me...maybe you have better luck? Message-ID: From shott at snf.stanford.edu Fri Nov 27 17:12:21 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 27 Nov 2009 17:12:21 -0800 Subject: Comment headway2 SNF 2009-11-27 17:12:21: Current status .... Message-ID: Mario and Gary: Here is what I found when I took a look at headway2: 1. The 4A fuse on the motor was blown. I've replaced that .... but it didn't change anything. 2. It appears as if the vacuum solenoid is stuck open because there is a vacuum reading of -10 to -13 in Hg even with no chuck on the end of the shaft. If you put your finger over the hole in the shaft, the vacuum goes to -25 in Hg. My guess is that the solenoid is chemically "glued" in the open condition. 3. However, even with your finger over the shaft, the motor does not appear to turn. This leads me to believe that the movement in the shaft that drives the vacuum detector switch is also chemically glued in the "no vacuum" condition. I can't really see down there well enough to see if there is any motion, but my guess is that everything that is supposed to be moving in both the vacuum solenoid and in the vacuum detector have gotten glued shut by some mix of resist, acetone, LOL and friends. Thanks, John From gsosa at snf.stanford.edu Sat Nov 28 12:24:32 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 28 Nov 2009 12:24:32 -0800 Subject: Problem headway2 SNF 2009-11-27 00:46:25: Vacuum does not turn off Message-ID: 2 problems- Vacuum will not turn off and spindle will not spin. 1st problem: Verified that spindle shaft was not clogged. Spindle shaft OK and no residual chemicals in the trap. Removed solenoid body. Plunger appeared to be stuck but not by chemicals. Base and body looked fairly clean. Cleaned up plunger, body and base and re-assembled. Vacuum switched on and off OK several times and then got stuck again. Suspect that there is now wear and friction in the plunger and body or spring is getting weak. Replaced the plunger, body and base with new. Tested again, manu times. Vacuum switches on and off OK now and sensor is also responding normally. 2nd problem: Checked spindle. Spindle does not feel tight or have any drag on it. Checked fuse- Fuse also OK. Checked wiring to motor. found 1 wire loose in spade lug connector. Crimped the lug down to make better connnection. Tested motor operation- All OK. Tested system with several chucks. System appears to be functioning normally now. System OK to use. From gsosa at snf.stanford.edu Sat Nov 28 12:24:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 28 Nov 2009 12:24:39 -0800 Subject: Problem headway2 SNF 2009-11-27 15:41:50: headway stopped spinning! Message-ID: 2 problems- Vacuum will not turn off and spindle will not spin. 1st problem: Verified that spindle shaft was not clogged. Spindle shaft OK and no residual chemicals in the trap. Removed solenoid body. Plunger appeared to be stuck but not by chemicals. Base and body looked fairly clean. Cleaned up plunger, body and base and re-assembled. Vacuum switched on and off OK several times and then got stuck again. Suspect that there is now wear and friction in the plunger and body or spring is getting weak. Replaced the plunger, body and base with new. Tested again, manu times. Vacuum switches on and off OK now and sensor is also responding normally. 2nd problem: Checked spindle. Spindle does not feel tight or have any drag on it. Checked fuse- Fuse also OK. Checked wiring to motor. found 1 wire loose in spade lug connector. Crimped the lug down to make better connnection. Tested motor operation- All OK. Tested system with several chucks. System appears to be functioning normally now. System OK to use. From gsosa at snf.stanford.edu Sat Nov 28 12:24:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 28 Nov 2009 12:24:44 -0800 Subject: Shutdown headway2 SNF 2009-11-27 16:05:52: does not spin for me...maybe you have better luck? Message-ID: 2 problems- Vacuum will not turn off and spindle will not spin. 1st problem: Verified that spindle shaft was not clogged. Spindle shaft OK and no residual chemicals in the trap. Removed solenoid body. Plunger appeared to be stuck but not by chemicals. Base and body looked fairly clean. Cleaned up plunger, body and base and re-assembled. Vacuum switched on and off OK several times and then got stuck again. Suspect that there is now wear and friction in the plunger and body or spring is getting weak. Replaced the plunger, body and base with new. Tested again, manu times. Vacuum switches on and off OK now and sensor is also responding normally. 2nd problem: Checked spindle. Spindle does not feel tight or have any drag on it. Checked fuse- Fuse also OK. Checked wiring to motor. found 1 wire loose in spade lug connector. Crimped the lug down to make better connnection. Tested motor operation- All OK. Tested system with several chucks. System appears to be functioning normally now. System OK to use. From gsosa at snf.stanford.edu Sat Nov 28 12:24:56 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 28 Nov 2009 12:24:56 -0800 Subject: Comment headway2 SNF 2009-11-27 17:12:21: Current status .... Message-ID: 2 problems- Vacuum will not turn off and spindle will not spin. 1st problem: Verified that spindle shaft was not clogged. Spindle shaft OK and no residual chemicals in the trap. Removed solenoid body. Plunger appeared to be stuck but not by chemicals. Base and body looked fairly clean. Cleaned up plunger, body and base and re-assembled. Vacuum switched on and off OK several times and then got stuck again. Suspect that there is now wear and friction in the plunger and body or spring is getting weak. Replaced the plunger, body and base with new. Tested again, manu times. Vacuum switches on and off OK now and sensor is also responding normally. 2nd problem: Checked spindle. Spindle does not feel tight or have any drag on it. Checked fuse- Fuse also OK. Checked wiring to motor. found 1 wire loose in spade lug connector. Crimped the lug down to make better connnection. Tested motor operation- All OK. Tested system with several chucks. System appears to be functioning normally now. System OK to use.