Problem headway2 SNF 2009-11-08 14:53:49: Unable to spin

jennyhu at snf.stanford.edu jennyhu at snf.stanford.edu
Sun Nov 8 14:53:49 PST 2009


The vacuum seems okay, but the chuck cannot rotate.  There was a lot of resist on the aluminum underside of the headway cover from previous users.  Thought it might be photoresist or LOL2000 causing the chuck to be stuck, so tried to clean with acetone and MF26. Unfortunately, it didn't help.




More information about the headway2-pcs mailing list