Comment headway2 SNF 2009-11-10 12:20:54: found spindle clogged

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Nov 10 12:20:55 PST 2009


coming on the tool we found the spinner contaminated with LOL or Optical resist.  The spindle was clogged and the vacuum sense switch was non functional.
Disabled USer hktran from tool and she will need to be retrained as this was the third time she had been a previous user when problems arose.  Likely a training retraining issue to be addressed with him/her
JWC




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