From arkam at snf.stanford.edu Fri Apr 2 11:42:58 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Fri, 2 Apr 2010 11:42:58 -0700 Subject: Shutdown headway2 SNF 2010-04-02 11:42:58: Message-ID: From shott at snf.stanford.edu Fri Apr 2 11:48:24 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Apr 2010 11:48:24 -0700 Subject: Shutdown headway2 SNF 2010-04-02 11:42:58: Message-ID: Shutdown by mistake .... John From sqliu at snf.stanford.edu Mon Apr 19 14:28:16 2010 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Mon, 19 Apr 2010 14:28:16 -0700 Subject: Problem headway2 SNF 2010-04-19 14:28:16: Fuse blows above 5000RPM Message-ID: From vilanova at snf.stanford.edu Mon Apr 19 14:55:30 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Apr 2010 14:55:30 -0700 Subject: Problem headway2 SNF 2010-04-19 14:28:16: Fuse blows above 5000RPM Message-ID: Replaced Burned fuse. From sqliu at snf.stanford.edu Mon Apr 19 17:48:13 2010 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Mon, 19 Apr 2010 17:48:13 -0700 Subject: Shutdown headway2 SNF 2010-04-19 17:48:12: Won't spin Message-ID: Tried to reach 8krpm to spin ZEP. Stopped spinning at around 6krpm and won't spin again. Seems like the fuse. From gsosa at snf.stanford.edu Tue Apr 20 10:04:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 20 Apr 2010 10:04:45 -0700 Subject: Shutdown headway2 SNF 2010-04-19 17:48:12: Won't spin Message-ID: Did-assembled spindle and cleaned top bearing. Cleaned inside and outside of spindle shaft. Checked vacuum level and sensor operation- All OK. Re-assembled and aligned spindle through the feedthrough. Replaced the fuse. Tested spindle only with no load to 9 KRPM for 80 seconds- OK. Tested spindle with 4 inch wafer to 9 KRPM for 80 seconds- OK. System OK to use. From dpb167 at snf.stanford.edu Mon Apr 26 15:59:34 2010 From: dpb167 at snf.stanford.edu (dpb167 at snf.stanford.edu) Date: Mon, 26 Apr 2010 15:59:34 -0700 Subject: Comment headway2 SNF 2010-04-26 15:59:33: resist on bench Message-ID: there's a good amount of resist on the bench, including one large splotch, from a previous user. I used a clear polymer... don't want to get dinged for it. From tdo at snf.stanford.edu Wed Apr 28 09:51:58 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 28 Apr 2010 09:51:58 -0700 Subject: Problem headway2 SNF 2010-04-28 09:51:57: squealing, variation in speed Message-ID: high pitched squeal and sometimes variation in speed -- probably due for cleaning From vilanova at snf.stanford.edu Wed Apr 28 15:11:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Apr 2010 15:11:13 -0700 Subject: Comment headway2 SNF 2010-04-28 15:11:13: Headway Message-ID: System Needs to be clean but theres a lot o Reservations for it , and I need At least a couple of Hours to do it, I will try to do it tomorrow morning ..... From rostam at snf.stanford.edu Wed Apr 28 18:45:31 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 28 Apr 2010 18:45:31 -0700 Subject: Problem headway2 SNF 2010-04-28 18:45:31: chuck doesn't spin Message-ID: The chuck desn't spin. I even put my finger on the chuck hole; the chuck didn't spin. From dalyx at snf.stanford.edu Wed Apr 28 19:59:42 2010 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Wed, 28 Apr 2010 19:59:42 -0700 Subject: Shutdown headway2 SNF 2010-04-28 19:59:42: definitely doesn't spin. Message-ID: Vaccuum seems ok, but chuck doesnt spin. From vilanova at snf.stanford.edu Thu Apr 29 09:58:55 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 09:58:55 -0700 Subject: Shutdown headway2 SNF 2010-04-28 19:59:42: definitely doesn't spin. Message-ID: cleaned spindle shaft vacuum hoses fittings and catch cup , removed a whole bunch of dry resist residues from it, cleaned hotplate and bench, cleaned all the chucks and replaced Orings, Tested, ok Ready to use. From vilanova at snf.stanford.edu Thu Apr 29 09:59:02 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 09:59:02 -0700 Subject: Problem headway2 SNF 2010-04-28 18:45:31: chuck doesn't spin Message-ID: cleaned spindle shaft vacuum hoses fittings and catch cup , removed a whole bunch of dry resist residues from it, cleaned hotplate and bench, cleaned all the chucks and replaced Orings, Tested, ok Ready to use. From vilanova at snf.stanford.edu Thu Apr 29 09:59:15 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 09:59:15 -0700 Subject: Comment headway2 SNF 2010-04-28 15:11:13: Headway Message-ID: cleaned spindle shaft vacuum hoses fittings and catch cup , removed a whole bunch of dry resist residues from it, cleaned hotplate and bench, cleaned all the chucks and replaced Orings, Tested, ok Ready to use. From vilanova at snf.stanford.edu Thu Apr 29 09:59:22 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 09:59:22 -0700 Subject: Problem headway2 SNF 2010-04-28 09:51:57: squealing, variation in speed Message-ID: cleaned spindle shaft vacuum hoses fittings and catch cup , removed a whole bunch of dry resist residues from it, cleaned hotplate and bench, cleaned all the chucks and replaced Orings, Tested, ok Ready to use. From vilanova at snf.stanford.edu Thu Apr 29 09:59:28 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 09:59:28 -0700 Subject: Comment headway2 SNF 2010-04-26 15:59:33: resist on bench Message-ID: cleaned spindle shaft vacuum hoses fittings and catch cup , removed a whole bunch of dry resist residues from it, cleaned hotplate and bench, cleaned all the chucks and replaced Orings, Tested, ok Ready to use. From rissman at snf.stanford.edu Fri Apr 30 10:55:33 2010 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 30 Apr 2010 10:55:33 -0700 Subject: Problem headway2 SNF 2010-04-30 10:55:33: noise during acceleration and deceleration Message-ID: The spinner made a "gronk" noise during acceleration and deceleration. Wafers spun fine. Could it be a bearing issue? Happened with chuck with teflon centering ring. Didn't seem as bad with ordinary 4" chuck.