Shutdown headway2 SNF 2010-04-19 17:48:12: Won't spin

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Apr 20 10:04:45 PDT 2010


Did-assembled spindle and cleaned top bearing. Cleaned inside and outside of spindle shaft. Checked vacuum level and sensor operation- All OK. Re-assembled and aligned spindle through the feedthrough. Replaced the fuse. Tested spindle only with no load to 9 KRPM for 80 seconds- OK. Tested spindle with 4 inch wafer to 9 KRPM for 80 seconds- OK. System OK to use.




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