Problem headway2 SNF 2010-04-28 18:45:31: chuck doesn't spin

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 29 09:59:02 PDT 2010


cleaned spindle shaft vacuum hoses fittings and catch cup , 
removed a whole bunch of dry resist residues from it, 
cleaned hotplate and bench, cleaned all the chucks and replaced
Orings, Tested, ok Ready to use. 




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