Problem headway2 SNF 2010-04-30 10:55:33: noise during acceleration and deceleration

rissman at snf.stanford.edu rissman at snf.stanford.edu
Fri Apr 30 10:55:33 PDT 2010


The spinner made a "gronk" noise during acceleration and deceleration.  Wafers spun fine.  Could it be a bearing issue?  Happened with chuck with teflon centering ring.  Didn't seem as bad with ordinary 4" chuck.




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