From rostam at snf.stanford.edu Tue Jun 1 03:20:50 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 1 Jun 2010 03:20:50 -0700 Subject: Shutdown headway2 SNF 2010-06-01 03:20:50: coater doesn't spin Message-ID: From vilanova at snf.stanford.edu Tue Jun 1 07:46:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:46:49 -0700 Subject: Shutdown headway2 SNF 2010-06-01 03:20:50: coater doesn't spin Message-ID: there was nothing wrong with the System , the problem was the chucks I FOund them Full of resist and SU8 All of them!!! if Users DOnt clean After themselfs , if users dont clean the chucks before they Use them If they dont Place the chuckin the right position Spindle and chucks have a D shape) the system will not work , vacuum will not work! I just spent an hour cleaning all that up , chucks Spindle shaft ( Found it full of resist , Also the bench was full of resist, I cleaned all that up and checked system with a "clean " chuck , everything FIne and working perfectly, Cleaned all chucks Spindle replaced O rings cleaned bench system ok to use. From vilanova at snf.stanford.edu Tue Jun 1 07:46:56 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:46:56 -0700 Subject: Problem headway2 SNF 2010-05-31 18:02:17: spindle + chucks, Message-ID: there was nothing wrong with the System , the problem was the chucks I FOund them Full of resist and SU8 All of them!!! if Users DOnt clean After themselfs , if users dont clean the chucks before they Use them If they dont Place the chuckin the right position Spindle and chucks have a D shape) the system will not work , vacuum will not work! I just spent an hour cleaning all that up , chucks Spindle shaft ( Found it full of resist , Also the bench was full of resist, I cleaned all that up and checked system with a "clean " chuck , everything FIne and working perfectly, Cleaned all chucks Spindle replaced O rings cleaned bench system ok to use. From vilanova at snf.stanford.edu Tue Jun 1 07:47:02 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:47:02 -0700 Subject: Problem headway2 SNF 2010-05-29 11:50:56: found resist cont. gloves and wipes in trash Message-ID: there was nothing wrong with the System , the problem was the chucks I FOund them Full of resist and SU8 All of them!!! if Users DOnt clean After themselfs , if users dont clean the chucks before they Use them If they dont Place the chuckin the right position Spindle and chucks have a D shape) the system will not work , vacuum will not work! I just spent an hour cleaning all that up , chucks Spindle shaft ( Found it full of resist , Also the bench was full of resist, I cleaned all that up and checked system with a "clean " chuck , everything FIne and working perfectly, Cleaned all chucks Spindle replaced O rings cleaned bench system ok to use. From vilanova at snf.stanford.edu Tue Jun 1 07:47:08 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:47:08 -0700 Subject: Problem headway2 SNF 2010-05-29 11:29:46: potential source of smell Message-ID: there was nothing wrong with the System , the problem was the chucks I FOund them Full of resist and SU8 All of them!!! if Users DOnt clean After themselfs , if users dont clean the chucks before they Use them If they dont Place the chuckin the right position Spindle and chucks have a D shape) the system will not work , vacuum will not work! I just spent an hour cleaning all that up , chucks Spindle shaft ( Found it full of resist , Also the bench was full of resist, I cleaned all that up and checked system with a "clean " chuck , everything FIne and working perfectly, Cleaned all chucks Spindle replaced O rings cleaned bench system ok to use. From vilanova at snf.stanford.edu Tue Jun 1 07:47:14 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:47:14 -0700 Subject: Comment headway2 SNF 2010-05-29 10:59:08: huge mess at headway Message-ID: there was nothing wrong with the System , the problem was the chucks I FOund them Full of resist and SU8 All of them!!! if Users DOnt clean After themselfs , if users dont clean the chucks before they Use them If they dont Place the chuckin the right position Spindle and chucks have a D shape) the system will not work , vacuum will not work! I just spent an hour cleaning all that up , chucks Spindle shaft ( Found it full of resist , Also the bench was full of resist, I cleaned all that up and checked system with a "clean " chuck , everything FIne and working perfectly, Cleaned all chucks Spindle replaced O rings cleaned bench system ok to use. From gth at snf.stanford.edu Wed Jun 2 00:17:10 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 2 Jun 2010 00:17:10 -0700 Subject: Problem headway2 SNF 2010-06-02 00:17:10: white hot plate not correct Message-ID: I dialed 90C for the PR bake, the central region (3" dia is hot) but the peripheral region is cool. Please remove the white hot plate if it can not be repaired, as it is misleading. From rostam at snf.stanford.edu Wed Jun 2 04:00:27 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 2 Jun 2010 04:00:27 -0700 Subject: Comment headway2 SNF 2010-06-02 04:00:26: hissing sound Message-ID: the line next to headway for vacuuming desiccators is hissing. i turned it to all 4 different ways and it keeps hissing. i was wondering if this line has an off position. From vilanova at snf.stanford.edu Wed Jun 2 07:33:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Jun 2010 07:33:47 -0700 Subject: Comment headway2 SNF 2010-06-02 04:00:26: hissing sound Message-ID: Checked Fittings and turned Off Vacuum, NO more Hissing sound Please turn off the vacuum while not in use. From gsosa at snf.stanford.edu Wed Jun 2 09:09:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Jun 2010 09:09:32 -0700 Subject: Problem headway2 SNF 2010-06-02 00:17:10: white hot plate not correct Message-ID: Checked the hotplate temperature profile at 90 degrees. The center part of the hotplate within the 4" diameter is 90 degrees with a variation ofabout 3 degrees. The temperature drops off significantly at the outer extremes. Please position your samples int the center of the hotplate. From vilanova at snf.stanford.edu Mon Jun 7 07:47:24 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Jun 2010 07:47:24 -0700 Subject: Comment headway2 SNF 2010-06-07 07:47:24: Found the bench full of LOL200 all over , I cleaned it up. Message-ID: bench found full of Lol2000 Residues , cleaned up. From vilanova at snf.stanford.edu Tue Jun 8 08:25:05 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Jun 2010 08:25:05 -0700 Subject: Comment headway2 SNF 2010-06-08 08:25:04: 220-3 Message-ID: I've replaced the Small old 220-3 Bottle from the small yellow cabinet with a fresh 220-3 Resist , Also I found the Bench Full of resist again, I cleaned it up. From rissman at snf.stanford.edu Thu Jun 10 10:09:30 2010 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 10 Jun 2010 10:09:30 -0700 Subject: Comment headway2 SNF 2010-06-10 10:09:30: start stop noise Message-ID: The spinner is making a "gronk" noise on start and stop. Spins wafers fine. I checked a wafer without foil and it still makes the noise. From vilanova at snf.stanford.edu Fri Jun 11 09:06:39 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jun 2010 09:06:39 -0700 Subject: Comment headway2 SNF 2010-06-10 10:09:30: start stop noise Message-ID: checked system with and without foil and everything sounds normal, maybe the chuck was not all the way into the spindle., From vilanova at snf.stanford.edu Tue Jun 15 11:19:36 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Jun 2010 11:19:36 -0700 Subject: Shutdown headway2 SNF 2010-06-15 11:19:35: Broken Solenoid Message-ID: Previous User reported to me that vacuum and rotation wasnt good Checked system and I found the SOlenoid Broken . From vilanova at snf.stanford.edu Tue Jun 15 14:20:19 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Jun 2010 14:20:19 -0700 Subject: Shutdown headway2 SNF 2010-06-15 11:19:35: Broken Solenoid Message-ID: replaced broken vacuum solenoid and cleaned hoses fittings, tested Ok to use. From altamash at snf.stanford.edu Mon Jun 21 18:35:46 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Mon, 21 Jun 2010 18:35:46 -0700 Subject: Comment headway2 SNF 2010-06-21 18:35:45: headway does not sound normal Message-ID: also more fluctuations in spin speed during spin and some variabililty in vaccum