From mrlin at snf.stanford.edu Thu Mar 4 17:34:28 2010 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 4 Mar 2010 17:34:28 -0800 Subject: Problem headway2 SNF 2010-03-04 17:34:27: vaccum Message-ID: vaccum seems to not be very good, i think previous users got resist into the vaccum line. also, some o-rings are missing, e.g. on my favorite chuck. From vilanova at snf.stanford.edu Fri Mar 5 08:09:23 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:09:23 -0800 Subject: Problem headway2 SNF 2010-03-04 17:34:27: vaccum Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From vilanova at snf.stanford.edu Fri Mar 5 08:09:31 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:09:31 -0800 Subject: Comment headway2 SNF 2010-02-27 17:28:37: bench not clean before use Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From vilanova at snf.stanford.edu Fri Mar 5 08:09:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:09:47 -0800 Subject: Comment headway2 SNF 2010-02-01 08:06:43: Headway Status Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From vilanova at snf.stanford.edu Fri Mar 5 08:09:59 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:09:59 -0800 Subject: Comment headway2 SNF 2010-02-01 23:09:55: Clean Up Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From vilanova at snf.stanford.edu Fri Mar 5 08:10:05 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:10:05 -0800 Subject: Comment headway2 SNF 2010-02-11 19:04:16: poor cleanup job Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From vilanova at snf.stanford.edu Fri Mar 5 08:10:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:10:20 -0800 Subject: Problem headway2 SNF 2010-02-23 12:32:40: dirty to start Message-ID: 1) The hotplate was contaminated with a lot or resist. 2) the bench had a lot of resist residues. 3) There was no problem with vacuum, The problem was the chucks all of them were full o f resist residues and the Inside Orings needed to be change ,there were 10 to 12 Orings left on the small box, Please clean the chucks After you finish with your process so the next user will not have a " vacuum problem" . tested and ready to use. From jwc at snf.stanford.edu Tue Mar 9 11:24:55 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 9 Mar 2010 11:24:55 -0800 Subject: Shutdown headway2 SNF 2010-03-09 11:24:55: spindle clogged with resist or blk wax material Message-ID: COMING ONTO THE SYSTEM THE DECK AND HOTPLATE WAS COVERED WITH RED RESIST -LOL - AND POSSIBLY BLACK WAX OR GREASE TOO! CLEANED DECK AND HOT PLATE SURFACE WITH ACETONE AND IPA. UPON ATTEMPTING TO USE THE HEADWAY 2 SPINNER FOUND THE SPINDLE TO BE CLOGGED WITH RESIST. WHAT ID10T WOULD PUT A HOT PLATE ON A RESIST PROCESSING BENCH?!! FIRE HAZARD -- DAH!!! IT ALSO MAKES IT IMPOSSIBLE TO COVER THE DECK ENTIRELY WITH FOIL. DIFFICULT TO WIPE AND CLEAN THE BENCH OR CONTROL CONTAMINATION ON THIS BENCH. FINALLY IT SIMPLY ENABLES USERS TO NOT CLEAN UP AFTER THEMSELVES. CLASS CANCELLED! JWC From vilanova at snf.stanford.edu Tue Mar 9 13:28:45 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Mar 2010 13:28:45 -0800 Subject: Shutdown headway2 SNF 2010-03-09 11:24:55: spindle clogged with resist or blk wax material Message-ID: cleaned spindle shaft and tested, vacuum is Good system ready to use. From jwc at snf.stanford.edu Fri Mar 12 15:11:13 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 12 Mar 2010 15:11:13 -0800 Subject: I am sorry for the offensive email AN APOLOGY Message-ID: <4B9ACA11.4070002@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gsosa at snf.stanford.edu Tue Mar 16 08:50:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Mar 2010 08:50:08 -0700 Subject: Shutdown headway2 SNF 2010-03-16 08:50:07: Monthly PM Message-ID: Monthly PM From vilanova at snf.stanford.edu Tue Mar 16 10:43:37 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Mar 2010 10:43:37 -0700 Subject: Shutdown headway2 SNF 2010-03-16 08:50:07: Monthly PM Message-ID: Monthly Pm COMPLETED, ok to use. From mahnaz at stanford.edu Fri Mar 19 11:15:43 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 19 Mar 2010 11:15:43 -0700 Subject: Litho Yellow cabinet Message-ID: <4BA3BF4F.90308@stanford.edu> Hello all, I like to remind every one that the small yellow flammable cabinet in the litho is meant for small bottles of STANDARD resists and few small bottles of chemicals for spray coater and nothing else. *So clean up.* Your nonstandard resist bottles needs to go back to two yellow cabinet in the back by refrigerator. This morning, I found Su-8 bottle, AZ5214 which we keep in the refrigerator that was left in there. I took those back. If I find more chemicals that do not belong there, I will get rid of them without any notification so obey the rules please. mahnaz From tdo at snf.stanford.edu Sat Mar 27 13:09:48 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 27 Mar 2010 13:09:48 -0700 Subject: Problem headway2 SNF 2010-03-27 13:09:48: spin speed unstable Message-ID: set speed varies up to 20rpm From vilanova at snf.stanford.edu Mon Mar 29 07:47:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Mar 2010 07:47:47 -0700 Subject: Problem headway2 SNF 2010-03-27 13:09:48: spin speed unstable Message-ID: cleaned shaft , Also Found the bench dirty and also the spindle shaft the chucks were all dirty I also cleaned them up ( removed Insert Oring Cleaned with acetone and put back the oring so vacuum will be NIce and strong)) Cycled wafer , Set up speed at 200 RPm Speed stable at it. , ok to use.