From mahnaz at stanford.edu  Thu Sep  2 10:38:41 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 02 Sep 2010 10:38:41 -0700
Subject: Fwd: 90oC  and  115oC Hotplates Calibration
Message-ID: <4C7FE121.7090108@stanford.edu>



-------- Original Message --------
Subject: 	90oC and 115oC Hotplates Calibration
Date: 	Thu, 02 Sep 2010 10:30:23 -0700
From: 	Mario Vilanova <vilanova at stanford.edu>
To: 	svgcoat at snf.stanford.edu



  HEre are the Hotplates calibration Results After caibration )=
90oC = 90.3 oC
115oC = 115.7oC
Please do not Adjust the hotplate knobs because the temperature will go
out of range  and users will have problems with their process.


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From erichall at snf.stanford.edu  Fri Sep  3 10:57:22 2010
From: erichall at snf.stanford.edu (erichall at snf.stanford.edu)
Date: Fri, 3 Sep 2010 10:57:22 -0700
Subject: Comment headway2 SNF 2010-09-03 10:57:20: Large amount of cross-linked resist
Message-ID: <mailman.835.1356281775.3914.headway2-pcs@snf.stanford.edu>

There is a large amount of red cross-linked resist in the basin and on the top of the chuck.  It was not like this yesterday in the late afternoon,  so at some point during the evening or very early morning a user did not clean up after themselves.
The chuck is a little more sticky in terms of starting up at low spin speeds, which may indicate that resist has gotten down into the instrument.



From mtan at snf.stanford.edu  Sat Sep  4 12:51:45 2010
From: mtan at snf.stanford.edu (mtan at snf.stanford.edu)
Date: Sat, 4 Sep 2010 12:51:45 -0700
Subject: Problem headway2 SNF 2010-09-04 12:51:44: motor doesn't spin but vacuum works
Message-ID: <mailman.836.1356281775.3914.headway2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Sat Sep  4 20:15:54 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sat, 4 Sep 2010 20:15:54 -0700
Subject: Problem headway2 SNF 2010-09-04 12:51:44: motor doesn't spin but vacuum works
Message-ID: <mailman.837.1356281775.3914.headway2-pcs@snf.stanford.edu>

Spindle shaft very stiff and not spinning. Checked and replaced motor fuse. Checked and cleaned spindle shaft. Checled open flow vacuum- OK at 12" Hg, Spindle shaft not clogged. Checked vacuum with chuck and wafer-OK , 22" Hg. Tested speed up to 8KRPM- OK. System OK to use.



From gsosa at snf.stanford.edu  Sat Sep  4 20:16:01 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sat, 4 Sep 2010 20:16:01 -0700
Subject: Comment headway2 SNF 2010-09-03 10:57:20: Large amount of cross-linked resist
Message-ID: <mailman.838.1356281775.3914.headway2-pcs@snf.stanford.edu>

Spindle shaft very stiff and not spinning. Checked and replaced motor fuse. Checked and cleaned spindle shaft. Checled open flow vacuum- OK at 12" Hg, Spindle shaft not clogged. Checked vacuum with chuck and wafer-OK , 22" Hg. Tested speed up to 8KRPM- OK. System OK to use.



From bucklesm at snf.stanford.edu  Mon Sep  6 08:30:05 2010
From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu)
Date: Mon, 6 Sep 2010 08:30:05 -0700
Subject: Comment headway2 SNF 2010-09-06 08:30:04: scraping noise
Message-ID: <mailman.839.1356281775.3914.headway2-pcs@snf.stanford.edu>

Makes a scraping/grinding noise every few seconds and the rotation   speed decreases by about 500-800 RMP (ran at 5000 RPM).  Then the speed comes back up.



From bucklesm at snf.stanford.edu  Mon Sep  6 08:52:19 2010
From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu)
Date: Mon, 6 Sep 2010 08:52:19 -0700
Subject: Problem headway2 SNF 2010-09-06 08:52:18: periodic scraping noise + slow down
Message-ID: <mailman.840.1356281775.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Sep  7 08:43:04 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Sep 2010 08:43:04 -0700
Subject: Shutdown headway2 SNF 2010-09-07 08:43:03: replacing broken motor....... 
Message-ID: <mailman.841.1356281775.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Sep  7 15:16:03 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Sep 2010 15:16:03 -0700
Subject: Comment headway2 SNF 2010-09-07 15:16:02: Controller board down!
Message-ID: <mailman.842.1356281775.3914.headway2-pcs@snf.stanford.edu>

After replacing the motor and cleaning  All the fittings , The controller
 board didnt want to power up,  Swap the board from the old controller 
still doesnt work ,  called vendor to see if they had one in stock , , 
They will get back to me tomorrow , Sorry for the inconvinience.



From gsosa at snf.stanford.edu  Wed Sep  8 15:12:13 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 8 Sep 2010 15:12:13 -0700
Subject: Comment headway2 SNF 2010-09-07 15:16:02: Controller board down!
Message-ID: <mailman.843.1356281775.3914.headway2-pcs@snf.stanford.edu>

Top spindle motor bearing very rough. Replaced motor. Still blowing fuses and not spinning. Installed spare controller- Did not work. Had to re-configure the controller by installing 2 jumpers on PC board . Controller is now configured as an EC101 controller. Replaced all 4  motor connectors with solder in lugs for good contact. Spindle tested OK. Re-assembled the system . Verified chuck vacuum and vacuum sensor operation- OK. Tested spindle speed to 8500 RPM- OK. Tested system with wafer-OK. System ready to use.



From gsosa at snf.stanford.edu  Wed Sep  8 15:12:28 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 8 Sep 2010 15:12:28 -0700
Subject: Shutdown headway2 SNF 2010-09-07 08:43:03: replacing broken motor....... 
Message-ID: <mailman.844.1356281775.3914.headway2-pcs@snf.stanford.edu>

Top spindle motor bearing very rough. Replaced motor. Still blowing fuses and not spinning. Installed spare controller- Did not work. Had to re-configure the controller by installing 2 jumpers on PC board . Controller is now configured as an EC101 controller. Replaced all 4  motor connectors with solder in lugs for good contact. Spindle tested OK. Re-assembled the system . Verified chuck vacuum and vacuum sensor operation- OK. Tested spindle speed to 8500 RPM- OK. Tested system with wafer-OK. System ready to use.



From gsosa at snf.stanford.edu  Wed Sep  8 15:12:34 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 8 Sep 2010 15:12:34 -0700
Subject: Comment headway2 SNF 2010-09-06 08:30:04: scraping noise
Message-ID: <mailman.845.1356281775.3914.headway2-pcs@snf.stanford.edu>

Top spindle motor bearing very rough. Replaced motor. Still blowing fuses and not spinning. Installed spare controller- Did not work. Had to re-configure the controller by installing 2 jumpers on PC board . Controller is now configured as an EC101 controller. Replaced all 4  motor connectors with solder in lugs for good contact. Spindle tested OK. Re-assembled the system . Verified chuck vacuum and vacuum sensor operation- OK. Tested spindle speed to 8500 RPM- OK. Tested system with wafer-OK. System ready to use.



From gsosa at snf.stanford.edu  Wed Sep  8 15:12:39 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 8 Sep 2010 15:12:39 -0700
Subject: Problem headway2 SNF 2010-09-06 08:52:18: periodic scraping noise + slow down
Message-ID: <mailman.846.1356281775.3914.headway2-pcs@snf.stanford.edu>

Top spindle motor bearing very rough. Replaced motor. Still blowing fuses and not spinning. Installed spare controller- Did not work. Had to re-configure the controller by installing 2 jumpers on PC board . Controller is now configured as an EC101 controller. Replaced all 4  motor connectors with solder in lugs for good contact. Spindle tested OK. Re-assembled the system . Verified chuck vacuum and vacuum sensor operation- OK. Tested spindle speed to 8500 RPM- OK. Tested system with wafer-OK. System ready to use.



From sqliu at snf.stanford.edu  Sun Sep 19 17:27:00 2010
From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu)
Date: Sun, 19 Sep 2010 17:27:00 -0700
Subject: Problem headway2 SNF 2010-09-19 17:26:59: Shaft spins without chuck
Message-ID: <mailman.847.1356281775.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Sep 20 07:48:07 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 20 Sep 2010 07:48:07 -0700
Subject: Problem headway2 SNF 2010-09-19 17:26:59: Shaft spins without chuck
Message-ID: <mailman.848.1356281775.3914.headway2-pcs@snf.stanford.edu>

cleaned up spindle shaft and Fittings, FOund WHite  & black chemical residues all over it, Tested ok to use. 



From chongxie at stanford.edu  Wed Sep 22 14:27:37 2010
From: chongxie at stanford.edu (Chong Xie)
Date: Wed, 22 Sep 2010 14:27:37 -0700 (PDT)
Subject: Neg Photoresist
In-Reply-To: <4ACF9E2D.5090509@stanford.edu>
Message-ID: <2057539195.277172.1285190857440.JavaMail.root@zm02.stanford.edu>


Dear lab members,
I am looking for a negative photoresist that can go up to 7um (like spr220-7 but negative). I went through the lab material list and found the NR9-6000 from futurrex should work for me. If you happen to have it or something similar, can you spare me a little amount to test my process? Thanks!

chong