Comment headway2 SNF 2010-09-03 10:57:20: Large amount of cross-linked resist

erichall at snf.stanford.edu erichall at snf.stanford.edu
Fri Sep 3 10:57:22 PDT 2010


There is a large amount of red cross-linked resist in the basin and on the top of the chuck.  It was not like this yesterday in the late afternoon,  so at some point during the evening or very early morning a user did not clean up after themselves.
The chuck is a little more sticky in terms of starting up at low spin speeds, which may indicate that resist has gotten down into the instrument.




More information about the headway2-pcs mailing list