Problem headway2 SNF 2010-09-04 12:51:44: motor doesn't spin but vacuum works

gsosa at gsosa at
Sat Sep 4 20:15:54 PDT 2010

Spindle shaft very stiff and not spinning. Checked and replaced motor fuse. Checked and cleaned spindle shaft. Checled open flow vacuum- OK at 12" Hg, Spindle shaft not clogged. Checked vacuum with chuck and wafer-OK , 22" Hg. Tested speed up to 8KRPM- OK. System OK to use.

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