Problem headway2 SNF 2010-09-04 12:51:44: motor doesn't spin but vacuum works

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Sep 4 20:15:54 PDT 2010


Spindle shaft very stiff and not spinning. Checked and replaced motor fuse. Checked and cleaned spindle shaft. Checled open flow vacuum- OK at 12" Hg, Spindle shaft not clogged. Checked vacuum with chuck and wafer-OK , 22" Hg. Tested speed up to 8KRPM- OK. System OK to use.




More information about the headway2-pcs mailing list