Comment headway2 SNF 2010-09-03 10:57:20: Large amount of cross-linked resist

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Sep 4 20:16:01 PDT 2010


Spindle shaft very stiff and not spinning. Checked and replaced motor fuse. Checked and cleaned spindle shaft. Checled open flow vacuum- OK at 12" Hg, Spindle shaft not clogged. Checked vacuum with chuck and wafer-OK , 22" Hg. Tested speed up to 8KRPM- OK. System OK to use.




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