Comment headway2 SNF 2010-09-06 08:30:04: scraping noise

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Sep 8 15:12:34 PDT 2010


Top spindle motor bearing very rough. Replaced motor. Still blowing fuses and not spinning. Installed spare controller- Did not work. Had to re-configure the controller by installing 2 jumpers on PC board . Controller is now configured as an EC101 controller. Replaced all 4  motor connectors with solder in lugs for good contact. Spindle tested OK. Re-assembled the system . Verified chuck vacuum and vacuum sensor operation- OK. Tested spindle speed to 8500 RPM- OK. Tested system with wafer-OK. System ready to use.




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