From vilanova at snf.stanford.edu Fri Apr 1 10:55:35 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Apr 2011 10:55:35 -0700 Subject: Comment headway2 SNF 2011-04-01 10:55:34: Teflon Inserts and New chuck Message-ID: I cleaned and replaced the Teflon Insert, O rings to one of the chucks I also Put a brand new 4" chuck in the box. From gunjim at snf.stanford.edu Thu Apr 7 16:44:17 2011 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Thu, 7 Apr 2011 16:44:17 -0700 Subject: Problem headway2 SNF 2011-04-07 16:44:17: Vacuum not working Message-ID: From vilanova at snf.stanford.edu Fri Apr 8 07:43:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:43:23 -0700 Subject: Problem headway2 SNF 2011-04-07 16:44:17: Vacuum not working Message-ID: Spindle had resist Inside, I cleaned it up and vacuum working Fine Ok to use. From jwc at snf.stanford.edu Tue Apr 12 12:20:37 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Apr 2011 12:20:37 -0700 Subject: Comment headway2 SNF 2011-04-12 12:20:37: headway was found covered in LOL and a black material that was not ESPACER Message-ID: Upon coming onto the headway 2 coater we found a lot of resist residues of LOL and some black 'waxy' material that could not be removed from the deck and spinner surfaces with acetone or IPA. Water also did not remove the black waxy stuff. please send me community service 'volunteers' to strip and clean the decks with more aggressive materials... ;-) jwc From alsune at snf.stanford.edu Thu Apr 21 23:14:37 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 21 Apr 2011 23:14:37 -0700 Subject: Problem headway2 SNF 2011-04-21 23:14:36: No Rotation!!! Message-ID: Vacuum seems to be ok, but no rotation. Motor might be off. From zeyuan at snf.stanford.edu Thu Apr 21 23:40:22 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Thu, 21 Apr 2011 23:40:22 -0700 Subject: Shutdown headway2 SNF 2011-04-21 23:40:21: Motor is not working Message-ID: Like what happened weeks ago, the vacuum seems to be working, but no rotation. From vilanova at snf.stanford.edu Fri Apr 22 08:56:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Apr 2011 08:56:02 -0700 Subject: Comment headway2 SNF 2011-04-22 08:56:01: Found Spindle Full of Resist Message-ID: Found the spindle full of resist , system burned the fuse due to resist going to the motor and spindle. Cleaned spindle motor vacuum gaskets , hoses , Fittings , replaced Fuse, Cleaned Hotplate and bench , tested Ok , ready to use. We also have a new Cover is right next to Headway On the right hand side . From vilanova at snf.stanford.edu Fri Apr 22 08:56:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Apr 2011 08:56:19 -0700 Subject: Comment headway2 SNF 2011-04-12 12:20:37: headway was found covered in LOL and a black material that was not ESPACER Message-ID: Found the spindle full of resist , system burned the fuse due to resist going to the motor and spindle. Cleaned spindle motor vacuum gaskets , hoses , Fittings , replaced Fuse, Cleaned Hotplate and bench , tested Ok , ready to use. We also have a new Cover is right next to Headway On the right hand side . From vilanova at snf.stanford.edu Fri Apr 22 08:56:25 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Apr 2011 08:56:25 -0700 Subject: Problem headway2 SNF 2011-04-21 23:14:36: No Rotation!!! Message-ID: Found the spindle full of resist , system burned the fuse due to resist going to the motor and spindle. Cleaned spindle motor vacuum gaskets , hoses , Fittings , replaced Fuse, Cleaned Hotplate and bench , tested Ok , ready to use. We also have a new Cover is right next to Headway On the right hand side . From vilanova at snf.stanford.edu Fri Apr 22 08:56:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Apr 2011 08:56:31 -0700 Subject: Shutdown headway2 SNF 2011-04-21 23:40:21: Motor is not working Message-ID: Found the spindle full of resist , system burned the fuse due to resist going to the motor and spindle. Cleaned spindle motor vacuum gaskets , hoses , Fittings , replaced Fuse, Cleaned Hotplate and bench , tested Ok , ready to use. We also have a new Cover is right next to Headway On the right hand side . From suyog at snf.stanford.edu Sat Apr 23 01:17:24 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Sat, 23 Apr 2011 01:17:24 -0700 Subject: Problem headway2 SNF 2011-04-23 01:17:23: issues with the motor Message-ID: Vacuum seems ok. Chuck won't rotate From vilanova at snf.stanford.edu Mon Apr 25 08:24:48 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Apr 2011 08:24:48 -0700 Subject: Problem headway2 SNF 2011-04-23 01:17:23: issues with the motor Message-ID: liquid ( chemical White sticky stuff) Found All over the Vacuum Switch , reasons why it was burning fuses, Replaced fuse and cleaned Vacuum switch , Spin wafers , Ok to use. From zeyuan at snf.stanford.edu Mon Apr 25 22:54:27 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Mon, 25 Apr 2011 22:54:27 -0700 Subject: Shutdown headway2 SNF 2011-04-25 22:54:26: Same thing happened again! Motor problem Message-ID: Used the bigger chuck for piece. As the spin starts, the rpm value shoots up sometime to 30% higher than the set value. Use other chuck for this reason, but the same thing happened. After a few more times, the motor stopped rotation again. Exactly the same kind of behavior as before. Please find a long-term solution to this problem. If it is a chuck problem, please find out which chuck is causing the problem. Thanks! From vilanova at snf.stanford.edu Tue Apr 26 08:42:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Apr 2011 08:42:57 -0700 Subject: Shutdown headway2 SNF 2011-04-25 22:54:26: Same thing happened again! Motor problem Message-ID: Replaced burned Fuse, Didnt work , Replaced Controller and cleaned the vacuum switch again, Starter to work Fine, ok to use. From robertchen at snf.stanford.edu Tue Apr 26 19:40:37 2011 From: robertchen at snf.stanford.edu (robertchen at snf.stanford.edu) Date: Tue, 26 Apr 2011 19:40:37 -0700 Subject: Shutdown headway2 SNF 2011-04-26 19:40:36: Didn't pass vaccuum test Message-ID: With chuck on with no sample, didn't pass suction test. Placed wafer (no resist) on for test spin, did not spin. From vilanova at snf.stanford.edu Wed Apr 27 08:28:32 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:28:32 -0700 Subject: Shutdown headway2 SNF 2011-04-26 19:40:36: Didn't pass vaccuum test Message-ID: Vacuum wasnt working because the MOtor Blow the fuse again I just ordered a new vacuum switch because the one we have right now is contaminated with some white Stuff , this material is pretty nasty and hard to clean up , Please do not POUR any Liquid Into the MOtor shaft this makes it even worse . From jaehlee at snf.stanford.edu Wed Apr 27 15:22:55 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Wed, 27 Apr 2011 15:22:55 -0700 Subject: Shutdown headway2 SNF 2011-04-27 15:22:54: it's not spinning again. Message-ID: we've change the fuse as been told but soon after a fuse went out again after making a few turn. From suyog at snf.stanford.edu Wed Apr 27 18:35:13 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Wed, 27 Apr 2011 18:35:13 -0700 Subject: Comment headway2 SNF 2011-04-27 18:35:13: Fluse blown again Message-ID: Changed the fuse 2 times.. The motor spins for few rotations after changing the fuse. The fuse blows after few rotations. From gsosa at snf.stanford.edu Thu Apr 28 14:18:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Apr 2011 14:18:23 -0700 Subject: Shutdown headway2 SNF 2011-04-27 15:22:54: it's not spinning again. Message-ID: Attempted cleanup of original motor assembly(top and bottom bearings). Checked all connections to motor- OK. Motor still blowing fuses with no load applied. Replaced the spin motor and vacuum seal assembly. Tested spin motor with no load to 9.5KRPM- OK.Cleaned the feedthrough on plenum. Re-installled/ aligned motor onto plenum and tested spin again- OK. Replaced diaphragm assembly for vacuum switch. Adjusted vacuum switch for go / now condition with wafer chuck installed( crossover point is at 16" Hg). Tested with several chucks. Checked spindle vacuum with wafer and chuck- OK at 23" Hg. Tested spindle with chuck and wafer up to 9.5 KRPM- OK. System ready for use. From gsosa at snf.stanford.edu Thu Apr 28 14:18:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Apr 2011 14:18:30 -0700 Subject: Comment headway2 SNF 2011-04-27 18:35:13: Fluse blown again Message-ID: Attempted cleanup of original motor assembly(top and bottom bearings). Checked all connections to motor- OK. Motor still blowing fuses with no load applied. Replaced the spin motor and vacuum seal assembly. Tested spin motor with no load to 9.5KRPM- OK.Cleaned the feedthrough on plenum. Re-installled/ aligned motor onto plenum and tested spin again- OK. Replaced diaphragm assembly for vacuum switch. Adjusted vacuum switch for go / now condition with wafer chuck installed( crossover point is at 16" Hg). Tested with several chucks. Checked spindle vacuum with wafer and chuck- OK at 23" Hg. Tested spindle with chuck and wafer up to 9.5 KRPM- OK. System ready for use.