Shutdown headway2 SNF 2011-04-26 19:40:36: Didn't pass vaccuum test

robertchen at snf.stanford.edu robertchen at snf.stanford.edu
Tue Apr 26 19:40:37 PDT 2011


With chuck on with no sample, didn't pass suction test. Placed wafer (no resist) on for test spin, did not spin.




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