Shutdown headway2 SNF 2011-04-27 15:22:54: it's not spinning again.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 28 14:18:23 PDT 2011


Attempted cleanup of original motor assembly(top and bottom bearings). Checked all connections to motor- OK. Motor still blowing fuses with no load applied. Replaced the spin motor and vacuum seal assembly. Tested spin motor with no load to 9.5KRPM- OK.Cleaned the feedthrough on plenum.  Re-installled/ aligned motor onto plenum and tested spin again- OK. Replaced diaphragm assembly for vacuum switch. Adjusted vacuum switch for go / now condition with wafer chuck installed( crossover point is at 16" Hg). Tested with several chucks. Checked spindle vacuum with wafer and chuck- OK at 23" Hg. Tested spindle with chuck and wafer up to 9.5 KRPM- OK. System ready for use.




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