From gsosa at snf.stanford.edu Tue Jul 12 11:16:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jul 2011 11:16:14 -0700 Subject: Shutdown headway2 SNF 2011-07-12 11:16:14: Spindle clogged Message-ID: From gsosa at snf.stanford.edu Tue Jul 12 12:30:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jul 2011 12:30:19 -0700 Subject: Shutdown headway2 SNF 2011-07-12 11:16:14: Spindle clogged Message-ID: Spindle shaft clogged with black material. dis-assembled and cleaned the spindle shaft. Checked top and bottom bearings-OK, Spin freely. Checked vacuum solinoid-- OK. Tested spindle up to 8.5KRPM- OK. Tested vacuum sensor with and without chucks-OK (Switching at 17" Hg). System OK to use. From lrweiss at snf.stanford.edu Wed Jul 13 19:58:48 2011 From: lrweiss at snf.stanford.edu (lrweiss at snf.stanford.edu) Date: Wed, 13 Jul 2011 19:58:48 -0700 Subject: Problem headway2 SNF 2011-07-13 19:58:47: motor problem Message-ID: The headway vacuum pump is working but the motor itself is not. Wafers are vacuum sealed but will not spin. From biyang at snf.stanford.edu Thu Jul 14 00:39:33 2011 From: biyang at snf.stanford.edu (biyang at snf.stanford.edu) Date: Thu, 14 Jul 2011 00:39:33 -0700 Subject: Problem headway2 SNF 2011-07-14 00:39:33: motor doesn't spin Message-ID: same as previous user reported From vilanova at snf.stanford.edu Thu Jul 14 07:09:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 07:09:06 -0700 Subject: Shutdown headway2 SNF 2011-07-14 07:09:05: Motor Doesnt Spin. Message-ID: From vilanova at snf.stanford.edu Thu Jul 14 07:44:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 07:44:55 -0700 Subject: Problem headway2 SNF 2011-07-13 19:58:47: motor problem Message-ID: Found Spindle With Lots of Resist In and OUt, , Cleaned Up Spindle again, Replaced Burned Fuse, Tested Ok to use, Please clean After yourself, Do not pour Any Chemical Inside the shaft ( thats Going to make the problem even worse ) Clean the chuck before and After Every Use. From vilanova at snf.stanford.edu Thu Jul 14 07:45:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 07:45:02 -0700 Subject: Problem headway2 SNF 2011-07-14 00:39:33: motor doesn't spin Message-ID: Found Spindle With Lots of Resist In and OUt, , Cleaned Up Spindle again, Replaced Burned Fuse, Tested Ok to use, Please clean After yourself, Do not pour Any Chemical Inside the shaft ( thats Going to make the problem even worse ) Clean the chuck before and After Every Use. From vilanova at snf.stanford.edu Thu Jul 14 07:45:08 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jul 2011 07:45:08 -0700 Subject: Shutdown headway2 SNF 2011-07-14 07:09:05: Motor Doesnt Spin. Message-ID: Found Spindle With Lots of Resist In and OUt, , Cleaned Up Spindle again, Replaced Burned Fuse, Tested Ok to use, Please clean After yourself, Do not pour Any Chemical Inside the shaft ( thats Going to make the problem even worse ) Clean the chuck before and After Every Use. From altamash at snf.stanford.edu Sat Jul 16 13:01:55 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 16 Jul 2011 13:01:55 -0700 Subject: Comment headway2 SNF 2011-07-16 13:01:54: found PMMA like stains Message-ID: on the right side of the hot plate, when I came in. Cleaned using Acetone, Methanol, IPA. From zpatel at snf.stanford.edu Wed Jul 20 11:09:05 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:09:05 -0700 Subject: Comment headway2 SNF 2011-07-20 11:09:04: Al foil wrapping not good Message-ID: Al foil was just loosely placed (not wrapped ) around the spin coater From vilanova at snf.stanford.edu Fri Jul 22 08:47:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2011 08:47:26 -0700 Subject: Comment headway2 SNF 2011-07-16 13:01:54: found PMMA like stains Message-ID: Cleaned wetbench hotplate , Spindle shaft, Replaced FOil. From vilanova at snf.stanford.edu Fri Jul 22 08:47:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2011 08:47:31 -0700 Subject: Comment headway2 SNF 2011-07-20 11:09:04: Al foil wrapping not good Message-ID: Cleaned wetbench hotplate , Spindle shaft, Replaced FOil. From jparker at snf.stanford.edu Tue Jul 26 08:30:28 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 26 Jul 2011 08:30:28 -0700 Subject: Problem headway2 SNF 2011-07-26 08:30:28: Spins w/ no chuck loaded Message-ID: You can start the spinning with no chuck loaded, so there's probably resist sucked down the line messing with the vacuum sensor. Still had enough vacuum to hold my pieces, but I'd spin test wafers to make sure it holds yours before committing something to high speeds. From vilanova at snf.stanford.edu Tue Jul 26 08:41:27 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Jul 2011 08:41:27 -0700 Subject: Problem headway2 SNF 2011-07-26 08:30:28: Spins w/ no chuck loaded Message-ID: Cleaned Up Spindle and tested , Ok to use.