Problem headway2 SNF 2011-07-26 08:30:28: Spins w/ no chuck loaded

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Jul 26 08:30:28 PDT 2011


You can start the spinning with no chuck loaded, so there's probably resist sucked down the line messing with the vacuum sensor.
Still had enough vacuum to hold my pieces, but I'd spin test wafers to make sure it holds yours before committing something to high speeds.




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