From jparker at snf.stanford.edu Tue May 3 08:14:08 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 3 May 2011 08:14:08 -0700 Subject: Comment headway2 SNF 2011-05-03 08:14:07: 4" chuck clogged Message-ID: The hole in the center of the 4" chuck is completely clogged with resist. Use this chuck and the headway spins with no wafer loaded. Please clean up if you somehow get resist sucked into the vaccum. From vilanova at snf.stanford.edu Thu May 5 13:08:32 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 May 2011 13:08:32 -0700 Subject: Comment headway2 SNF 2011-05-05 13:08:31: CLeaned 2 of the 4" chucks ..... Message-ID: Cleaned 2 of the dirty chucks and replaced O rings. From gsosa at snf.stanford.edu Mon May 16 13:37:33 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 May 2011 13:37:33 -0700 Subject: Shutdown headway2 SNF 2011-05-16 13:37:32: checking out exhaust system Message-ID: From vilanova at snf.stanford.edu Mon May 16 14:12:50 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 May 2011 14:12:50 -0700 Subject: Shutdown headway2 SNF 2011-05-16 13:37:32: checking out exhaust system Message-ID: cleared ( Exhaust Fan Belt has been replaced From jwc at snf.stanford.edu Tue May 24 15:08:50 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 24 May 2011 15:08:50 -0700 Subject: Problem headway2 SNF 2011-05-24 15:08:50: LOL or LOR found all over all of the 100 mm chucks Message-ID: Hi During our 'Take a Spin iwth Me" class we found the chucks in the headway box completely covered with cross linked LOL or LOR resist that we COULD NOT remove using acetone or IPA. While we were able to spin our resist we discovered that upon inspection that the LOL and some optical resist traces has transferred to the backsides of the wafers and we are unable to remove them by any means. This has resulted in not only lost time and inconvienence to our class but also the death of valuable engineering materials costing several hundred of dollars to SNF. I propose we eliminate the Users working on this tool that are not considrate enough to clean up their resist when they are using SNF equipment and fixtures, in particular the LOL and LOR Users! Headway Users working since yesterday at 5 PM should see me during my office hours tomorrow (9 - 10 AM) or I will disable your login and access to this tool until you have completed community service. Thank you for your support! James Conway From jwc at snf.stanford.edu Thu May 26 13:35:21 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 May 2011 13:35:21 -0700 Subject: Problem headway2 SNF 2011-05-24 15:08:50: LOL or LOR found all over all of the 100 mm chucks Message-ID: we continue to closely monitor the wbmiscres bench to identify the bad User whom continues to bring grief to the lab every evening. From vilanova at snf.stanford.edu Fri May 27 09:00:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 May 2011 09:00:37 -0700 Subject: Comment headway2 SNF 2011-05-27 09:00:37: Cleaned..... Message-ID: Cleaned 4" Chucks and replaced the Orings, Some of the Chucks Were left dirty Inside the funnel In solvent Bench . ( this was yesterday ) From zeyuan at snf.stanford.edu Sat May 28 21:50:01 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sat, 28 May 2011 21:50:01 -0700 Subject: Comment headway2 SNF 2011-05-28 21:50:01: Dirty chuck found Message-ID: A dirty chuck is left on the bench. One of the 4 inch chuck lost its o ring. Cleaned the other 4 inch chuck. From jasonlin at snf.stanford.edu Sat May 28 22:27:05 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 28 May 2011 22:27:05 -0700 Subject: Comment headway2 SNF 2011-05-28 22:27:04: Dirty chuck Message-ID: Dirty chuck was found at the start of my session as well. From mahnaz at stanford.edu Tue May 31 10:27:18 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 31 May 2011 10:27:18 -0700 Subject: resist all over the floor Message-ID: <4DE524F6.1050703@stanford.edu> Hello all, This morning there were resist on the floor that started in front of headway and continued all the way to solvent bench. I am not sure what to make of it by only saying that Every one is responsible for the lab safety and safe behavior of the other lab members. *I leave this to James to decide what to do but in my book this is totally unacceptable. * I cleaned the floors. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: