Comment headway2 SNF 2011-05-03 08:14:07: 4" chuck clogged

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue May 3 08:14:08 PDT 2011


The hole in the center of the 4" chuck is completely clogged with resist. Use this chuck and the headway spins with no wafer loaded.  Please clean up if you somehow get resist sucked into the vaccum.




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