From jaehlee at snf.stanford.edu  Tue Oct  4 09:56:21 2011
From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu)
Date: Tue, 4 Oct 2011 09:56:21 -0700
Subject: Comment headway2 SNF 2011-10-04 09:56:20: It's spinning w/o checking vacuum 
Message-ID: <mailman.957.1356281776.3914.headway2-pcs@snf.stanford.edu>

When you load the chuck only, it spins w/o a wafer loaded. 



From vilanova at snf.stanford.edu  Tue Oct  4 10:56:39 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 4 Oct 2011 10:56:39 -0700
Subject: Comment headway2 SNF 2011-10-04 09:56:20: It's spinning w/o checking vacuum 
Message-ID: <mailman.958.1356281776.3914.headway2-pcs@snf.stanford.edu>

there was some Resist residues inside the shaft, Cleaned it up and 
tested ,  Vacuum is good system NOT rotation without a chuck,
Ok to use. 



From vilanova at snf.stanford.edu  Tue Oct 11 08:15:38 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 11 Oct 2011 08:15:38 -0700
Subject: Comment headway2 SNF 2011-10-11 08:15:37: Found A Dirty Chuck ,  I cleaned it up 
Message-ID: <mailman.959.1356281776.3914.headway2-pcs@snf.stanford.edu>

Found A Dirty Chuck ,  I cleaned it up 



From khu834 at snf.stanford.edu  Mon Oct 17 16:22:22 2011
From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu)
Date: Mon, 17 Oct 2011 16:22:22 -0700
Subject: Comment headway2 SNF 2011-10-17 16:22:22: spin speed fluctuating
Message-ID: <mailman.960.1356281776.3914.headway2-pcs@snf.stanford.edu>

System does not maintain a constant spin speed.
Fluctuates by about 20-30RPM.



From vilanova at snf.stanford.edu  Wed Oct 19 07:54:21 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 19 Oct 2011 07:54:21 -0700
Subject: Comment headway2 SNF 2011-10-19 07:54:20: cleaned up chucks ( 2 each ) and replaced the Orings 
Message-ID: <mailman.961.1356281776.3914.headway2-pcs@snf.stanford.edu>

cleaned up chucks ( 2 each ) and replaced the Orings



From vilanova at snf.stanford.edu  Wed Oct 19 07:56:14 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 19 Oct 2011 07:56:14 -0700
Subject: Comment headway2 SNF 2011-10-17 16:22:22: spin speed fluctuating
Message-ID: <mailman.962.1356281776.3914.headway2-pcs@snf.stanford.edu>

tested system, All Operations are Ok, make sure you 
clean  the chuck before and after every use. 



From mahnaz at snf.stanford.edu  Mon Oct 31 13:37:43 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Mon, 31 Oct 2011 13:37:43 -0700
Subject: Shutdown headway2 SNF 2011-10-31 13:37:42: spindel spins 
Message-ID: <mailman.963.1356281776.3914.headway2-pcs@snf.stanford.edu>

without chuck or wafer on it.



From vilanova at snf.stanford.edu  Mon Oct 31 14:15:36 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 31 Oct 2011 14:15:36 -0700
Subject: Shutdown headway2 SNF 2011-10-31 13:37:42: spindel spins 
Message-ID: <mailman.964.1356281776.3914.headway2-pcs@snf.stanford.edu>

Removed Exscess of Resist from the Spindle shaft and retested, 
System Ok , Ready to use.