Comment headway2 SNF 2011-10-04 09:56:20: It's spinning w/o checking vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 4 10:56:39 PDT 2011


there was some Resist residues inside the shaft, Cleaned it up and 
tested ,  Vacuum is good system NOT rotation without a chuck,
Ok to use. 




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