From lindaw at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 4, 2000 Subject: Problem headway2: vacuum loss during spin Message-ID: The vacuum seems to be letting go of the wafers . Unusable in my opinion. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 4, 2000 Subject: Problem Clear headway2: Message-ID: vacuum hose replaced From lindaw at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 4, 2000 Subject: Problem headway2: shaft still spins w/o wafer Message-ID: the shaft spins without any wafer or chuck. Maybe the hole in the shaft is blocked as well as the drain tube that was changed today. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 5, 2000 Subject: Problem Clear headway2: Message-ID: shaft cleaned, tested ok to use. From lin at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lin at snf.stanford.edu (lin at snf.stanford.edu) Date: May 6, 2000 Subject: Problem headway2: the vacuum does not work. Message-ID: The vacuum does not work so the wafer can not stay on the chuck. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 8, 2000 Subject: Problem Clear headway2: Message-ID: vacuum path cleaned tested , Working ok From lindaw at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 12, 2000 Subject: Problem headway2: shaft spins w/o wafer, has vac though Message-ID: From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 12, 2000 Subject: Problem Clear headway2: Message-ID: system clogged , cleaned, tested working ok From lin at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lin at snf.stanford.edu (lin at snf.stanford.edu) Date: May 23, 2000 Subject: Problem headway2: the chuck vaccum does not work Message-ID: From martinez at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 25, 2000 Subject: Problem Clear headway2: Message-ID: cleaned resist from spindle. ready for use From rjchen at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: rjchen at snf.stanford.edu (rjchen at snf.stanford.edu) Date: Jun 1, 2000 Subject: Problem headway2: headway2 Message-ID: spins without chuck. wafers and pieces fly off below 2000 rpm From lindaw at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 1, 2000 Subject: Problem headway2: chuck vac always on Message-ID: From martinez at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 1, 2000 Subject: Problem Clear headway2: Message-ID: cleaned resist from solenoid innards. tested ok. From martinez at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 1, 2000 Subject: Problem Clear headway2: Message-ID: vac problem fixed. ok to use. From kevinlin at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: kevinlin at snf.stanford.edu (kevinlin at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem headway2: vacuum Message-ID: coater does not spin. seems like vacuum leak somewhere From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem Clear headway2: Message-ID: Vacuum hose Cleaned,System Working Ok From ssinha at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Aug 9, 2000 Subject: Problem headway2: Message-ID: It fails vacuum check. It spins without chuck, hence this write up as per operating instructions. From martinez at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 10, 2000 Subject: Problem Clear headway2: Message-ID: replaced old vacuum thingamabob with a newer, deluxe thingamabob From lindaw at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Oct 2, 2000 Subject: Problem headway2: spinner not level Message-ID: From martinez at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 2, 2000 Subject: Problem Clear headway2: headway level Message-ID: leveled chuck tested ok. From mahnaz at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 9, 2000 Subject: Problem headway2: Message-ID: From mahnaz at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 9, 2000 Subject: Problem Clear headway2: Message-ID: From armandhr at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: armandhr at snf.stanford.edu (armandhr at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-09-05 10:12:28: No aluminum foil Message-ID: <11057486.35.1346865148527.JavaMail.coral@shine> There is no aluminum foil near headway, or anywhere in the lab or back room that I could find. Has there been a change in policy regarding stocking aluminum foil? Is there somewhere else this should be found for cleaning up headway? From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-09-05 10:12:28: No aluminum foil Message-ID: <14599580.36.1346867501642.JavaMail.coral@shine> theres a big alumminum foil roll on top of the flammable small cabinet next to the srd ( Litho area) and also theres another roll on the rack across from the developer tracks, From tasyurek at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-09-24 20:29:18: lid and bench had resist Message-ID: <26409351.28.1348543759109.JavaMail.coral@shine> From mahnaz at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-10-05 09:53:55: vacuume error on the chuck Message-ID: <33386247.7.1349456035786.JavaMail.coral@shine> not getting enough of vac. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-10-05 09:53:55: vacuume error on the chuck Message-ID: <9501984.11.1349459058472.JavaMail.coral@shine> 2of the chucks Were Dirty With Resist Residues all the way around, Cleaned them Up and Replaced All Orings, tested, Ok To use. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-10-05 14:03:46: Cleaned up 3 of the Dirty chucks and replaced Orings Message-ID: <18328287.30.1349471027091.JavaMail.coral@shine> From dtschoen at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: dtschoen at snf.stanford.edu (dtschoen at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-10-10 14:20:29: Resist Everywhere Message-ID: <18469014.60.1349904029470.JavaMail.coral@shine> When arrived the entire right half of the bench was splattered with red resist residue. The vast majority came up easily with acetone and IPA, revealing that whoever the original person who was responsible did not even take a few minutes to attempt to wipe it up. From jparker at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-11-01 08:32:41: Thanks Mario Message-ID: <16720472.142.1351783961907.JavaMail.coral@shine> Thank you to Mario for a full scrub-down of headway. There were many large areas of hardened materials---please put down foil and acetone wipe your messes before they become dry and hard to remove. From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-11-09 11:07:41: New Chuck Teflon Inserts.... Message-ID: <15936990.10.1352488062227.JavaMail.coral@shine> We 've just Replaced 2 of the Chucks White teflon Inserts , make sure the Teflon Insert D shape is insert it Properly to the D shape Spindle and please clean Up the Chucks After use them. Thank you . P.S. We Will be changing all of the Teflon Inserts 2 at the time. From robertchen at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: robertchen at snf.stanford.edu (robertchen at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-11-14 21:02:23: The lid doesn't lock closed, but still runs. Message-ID: <19929001.71.1352955743960.JavaMail.coral@shine> From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-11-14 21:02:23: The lid doesn't lock closed, but still runs. Message-ID: <5626806.73.1352990337835.JavaMail.coral@shine> Close the Lid, Lose the knob and Turn it Clockwise Until It locks In place. From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-11-19 09:02:26: Badger Install 11/19 Message-ID: <19391678.6.1353344547529.JavaMail.coral@shine> Installed and tested badger box. OK From jrshakya at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-11-23 22:14:09: The cover doesn't close. Message-ID: <21608872.18.1353737649716.JavaMail.coral@shine> From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-11-23 22:14:09: The cover doesn't close. Message-ID: <22405308.5.1353940851263.JavaMail.coral@shine> This shouldnt be a problem , This One should be a comment. JUST TURN THE LID KNOB TO THE RIGHT WHILE PRESSING DOWN AND THE LID WILL CLOSE. From mtang at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-12-01 07:40:20: SRD Message-ID: <33275114.26.1354376421070.JavaMail.coral@shine> Do not use the litho SRD. There was a wafer broken inside. From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-08-13 08:43:42: Refilled Small Resist Bottles... Message-ID: <9619575.46.1354721718208.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-11-01 12:37:01: somepne reported a problem with headway.... Message-ID: <29621755.47.1354721724267.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-11-19 11:16:07: replaced Old small resist bottle & droplets Message-ID: <1789183.48.1354721731335.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-11-19 11:27:03: Contaminated Chuck Message-ID: <14066641.49.1354721740434.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-11-23 07:58:32: spinner hotplate and bench messy Message-ID: <20171724.50.1354721746502.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2010-12-10 08:48:04: refilled small Resist Bottles & cleaned Hotplate Message-ID: <2831089.51.1354721751559.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-06-24 11:21:30: Cleaned All chucks and replaced all the Orings Message-ID: <20130569.52.1354721756617.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-10-11 08:15:37: Found A Dirty Chuck , I cleaned it up Message-ID: <2729163.53.1354721762686.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-10-19 07:54:20: cleaned up chucks ( 2 each ) and replaced the Orings Message-ID: <24675200.54.1354721766713.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-11-17 11:36:22: Cleaned up Chucks Message-ID: <11004759.55.1354721771760.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-11-22 14:05:33: cleaned up 3 chucks Message-ID: <29667782.56.1354721775807.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-11-28 13:11:04: FOund a dirty chuck in 1 of the benches Message-ID: <826883.57.1354721780867.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2011-12-02 13:35:28: around area was a bit dirty (PR dirts near N2 gun) Message-ID: <12947438.58.1354721786934.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-04-12 10:37:26: Hotplate Next to Headway Spinner Message-ID: <1061306.59.1354721811171.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-04-27 11:01:30: Clogged Vacuum Message-ID: <13613986.60.1354721816229.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-05-08 13:56:52: Resist around Post Message-ID: <1647407.61.1354721829367.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-06-04 08:19:35: Cle3aned Up Messy Be3nch and Headway Bowl Message-ID: <28617320.62.1354721835415.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-06-22 11:55:46: found a large number of chucks coverd in optical resist Message-ID: <11424966.63.1354721843503.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Comment headway2 SNF 2012-09-24 20:29:18: lid and bench had resist Message-ID: <32996911.64.1354721849561.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-12-01 07:40:20: SRD Message-ID: <17242295.2.1354808166373.JavaMail.coral@shine> Moved problem to wbmisres . From kcbalram at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-12-15 17:23:29: Chuck not holding vacuum Message-ID: <30536716.54.1355621009401.JavaMail.coral@shine> From vilanova at snf.stanford.edu Sun Dec 23 08:56:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:56:07 -0000 Subject: Problem headway2 SNF 2012-12-15 17:23:29: Chuck not holding vacuum Message-ID: <17470437.22.1355761310288.JavaMail.coral@shine> Vacuum Working Fine, There was a little bit of resist inside the shaft, Cleaned shaft and tested system Vacuum Ok All Operations are ok, Ready to use.