Problem headway2: the vacuum does not work.
lin at snf.stanford.edu
lin at snf.stanford.edu
Sun Dec 23 08:56:07 PST 2012
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Problem headway2: shaft spins w/o wafer, has vac though
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The vacuum does not work so the wafer can not stay on the chuck.
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Problem headway2: shaft still spins w/o wafer
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Problem headway2: shaft spins w/o wafer, has vac though
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