Problem headway2 SNF 2012-10-05 09:53:55: vacuume error on the chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 08:56:07 PST 2012


2of the chucks Were Dirty With Resist Residues all
the way around, Cleaned them Up and Replaced All Orings, tested, Ok To use. 



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