From jackson at snf.stanford.edu  Mon May  7 21:46:16 2012
From: jackson at snf.stanford.edu (jackson at snf.stanford.edu)
Date: Mon, 7 May 2012 21:46:16 -0700
Subject: Problem headway2 SNF 2012-05-07 21:46:16: vacuum line plugged 
Message-ID: <mailman.985.1356281776.3914.headway2-pcs@snf.stanford.edu>

the vacuum line must be partially plugged and will throw wafers off and keep spinning....my wafer broke   



From gsosa at snf.stanford.edu  Tue May  8 08:54:21 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 8 May 2012 08:54:21 -0700
Subject: Problem headway2 SNF 2012-05-07 21:46:16: vacuum line plugged 
Message-ID: <mailman.986.1356281776.3914.headway2-pcs@snf.stanford.edu>

Cleaned out the spindle shaft. Tested system operation- OK



From dtschoen at snf.stanford.edu  Tue May  8 13:56:53 2012
From: dtschoen at snf.stanford.edu (dtschoen at snf.stanford.edu)
Date: Tue, 8 May 2012 13:56:53 -0700
Subject: Comment headway2 SNF 2012-05-08 13:56:52: Resist around Post
Message-ID: <mailman.987.1356281776.3914.headway2-pcs@snf.stanford.edu>

There is a large amount of resist in the recessed area around the rotating post.