planarizing film

Ahmet Tura tura at ucla.edu
Wed Feb 15 15:59:18 PST 2006


I need a spin-on planarizing film (organic, dielectric, or otherwise) 
to planarize pillars that are ~0.5um tall and ~0.2um wide. I found out 
that the standard photoresists used at SNF are not quite suitable for 
this type of application. I was wondering if anyone has used anything 
similar at SNF, or could guide me on what to use.

Any help would be appreciated. Thank you,

-- 
Ahmet Tura
tura at ucla.edu



More information about the headway2 mailing list