From jwc at snf.stanford.edu Fri Mar 9 16:32:28 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 09 Mar 2007 16:32:28 -0800 Subject: ALERT: BOTTLE 2 OF THE 5% 495k PMMA SPINS OUT OF SPECIFICATION THICKNESS. Message-ID: <45F1FC9C.5010602@snf.stanford.edu> Greetings 5% 495K PMMA Users , I just tried to spin some Si wafers with 5% 495K PMMA and had difficulties pressing through a filter in a syringe and found the spin thicknesses re much greater than specification. 1960 RPM should give me about 300 nm and I am obtaining ~480 nm with very large variation across one wafer and from wafer to wafer. The material may have become gelled or hydrolysed from exposure to water vapor, breaths, or other contaminations or it may be a odd batch from our suppliers. I will look further into this Monday afternoon looking into this issue more closely and track back to batch lots. I recommend you spin up two wafers with the same spin speed and then measure on nanospec and adjust your speed to obtain target resist thicknesses. Users working with this material are requested to report their spin speed thickness data to me by email to jwc at snf.stanford.edu Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From dejia at stanford.edu Sun Mar 18 15:21:59 2007 From: dejia at stanford.edu (Deji A.) Date: Sun, 18 Mar 2007 14:21:59 -0800 Subject: ZEP520A empty In-Reply-To: <45F1FC9C.5010602@snf.stanford.edu> References: <45F1FC9C.5010602@snf.stanford.edu> Message-ID: <45FDBB87.5050408@stanford.edu> An HTML attachment was scrubbed... URL: