Shutdown innotec: innotec chamber ion pressure

wkim at wkim at
Mon Nov 6 11:56:16 PST 2000

The chamber ion pressure of innotec was too high after 12 hours pumping. 
It didn't go down below 5*e-5.
The cryopump temp was 16K.
Before I was using it, the Chamber ion pressure was the same(e-5) after 72 hour pumping but I thought it was casued by improroper pbell Jar closure. 
The pressure cross over was okay.

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