From ericp at snf.stanford.edu  Mon Feb  4 02:29:51 2002
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Feb 4, 2002 2:29:51 AM
Subject: Shutdown innotec 2002-02-04 02:29:50: Chiller dead
Message-ID: <mailman.56.1357938396.25732.innotec-pcs@snf.stanford.edu>

WFS1 and WFS2 interlocks are on and won't come off. 
Looked at actual flow switches, no flow.  
Chiller head unit indicates that chiller is off, and 
will not start.  
Wafers are loaded (and fragile!).  



From maurice at snf.stanford.edu  Mon Feb  4 09:26:03 2002
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Feb 4, 2002 9:26:03 AM
Subject: Shutdown innotec 2002-02-04 02:29:50: Chiller dead
Message-ID: <mailman.57.1357938396.25732.innotec-pcs@snf.stanford.edu>

Water level in chiller topped off by Jim H.



From jperez at snf.stanford.edu  Wed Feb  6 09:07:14 2002
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Feb 6, 2002 9:07:14 AM
Subject: Shutdown innotec 2002-02-06 09:07:13: Innotec down for clean
Message-ID: <mailman.58.1357938396.25732.innotec-pcs@snf.stanford.edu>

Not able to train or use system with the amount of peeling 
occurring during small amounts of deposition (<500A).



From rcrane at snf.stanford.edu  Fri Feb 15 04:16:22 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Feb 15, 2002 4:16:22 PM
Subject: Shutdown innotec 2002-02-06 09:07:13: Innotec down for clean
Message-ID: <mailman.59.1357938396.25732.innotec-pcs@snf.stanford.edu>

Cleaned and coated. Ready for use.



From rcrane at snf.stanford.edu  Fri Feb 15 04:16:46 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Feb 15, 2002 4:16:46 PM
Subject: Problem innotec 2002-01-31 06:49:44: Peeling, use under your own risk
Message-ID: <mailman.60.1357938396.25732.innotec-pcs@snf.stanford.edu>

Cleaned and coated. Ready for use.