Shutdown innotec 2002-02-04 02:29:50: Chiller dead

ericp at ericp at
Mon Feb 4 02:29:51 PST 2002

WFS1 and WFS2 interlocks are on and won't come off. 
Looked at actual flow switches, no flow.  
Chiller head unit indicates that chiller is off, and 
will not start.  
Wafers are loaded (and fragile!).  

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