From maurice at snf.stanford.edu Thu May 2 11:33:56 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 2, 2002 11:33:56 AM Subject: Comment innotec 2002-05-02 11:33:55: Message-ID: Reservation dropped from 11:00 am to 2:30 pm today. From jperez at snf.stanford.edu Thu May 9 05:17:01 2002 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: May 9, 2002 5:17:01 PM Subject: Problem innotec 2002-05-09 17:17:01: Innotec in regen Message-ID: Temperature 20 K From jhaydon at snf.stanford.edu Fri May 10 08:44:35 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 10, 2002 8:44:35 AM Subject: Problem innotec 2002-05-09 17:17:01: Innotec in regen Message-ID: regen completed From lin_bryan at yahoo.com Mon May 13 15:17:13 2002 From: lin_bryan at yahoo.com (Bryan Lin) Date: Mon, 13 May 2002 15:17:13 -0700 (PDT) Subject: coat SiO2 in innotec Message-ID: <20020513221713.10454.qmail@web11105.mail.yahoo.com> Dear Innotec member: Is it possible to coat the SiO2 by Innotec if I buy SiO2 target for it? I know Si can be deposited on Innotec. But, the Si is semiconductor and SIO2 is insulator. Does anybody have experience for that. I know PECVD and balzer can deposit the SiO2, but I want to deposit SiO at low temperature environment. Only the Innotec can serve for this purpose. Thank you for your response in advanced. Bryan Lin --------------------------------- Do You Yahoo!? LAUNCH - Your Yahoo! Music Experience -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Mon May 13 15:44:42 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 13 May 2002 15:44:42 -0700 Subject: coat SiO2 in innotec References: <20020513221713.10454.qmail@web11105.mail.yahoo.com> Message-ID: <3CE041DA.45CC74A@snf.stanford.edu> Bryan, SiO2 will deposit nicely via e-beam evaporation and is rather straight forward. SiO is difficult to e-beam evaporate. I have evaporated SiO with a resistance heater successfully. SiO sublimes and tend to "pop", so a baffled, enclosed box is needed. Dick Bryan Lin wrote: > Dear Innotec member: > > Is it possible to coat the SiO2 by Innotec if I buy SiO2 target > > for it? I know Si can be deposited on Innotec. But, the > > Si is semiconductor and SIO2 is insulator. Does anybody > > have experience for that. I know PECVD and balzer can deposit > > the SiO2, but I want to deposit SiO at low temperature environment. > > Only the Innotec can serve for this purpose. > > Thank you for your response in advanced. > > Bryan Lin > > > ----------------------------------------------------------------------- > Do You Yahoo!? > LAUNCH - Your Yahoo! Music Experience -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Wed May 22 02:14:26 2002 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: May 22, 2002 2:14:26 PM Subject: Comment innotec 2002-05-22 14:14:25: Changed front crystal. Message-ID: From jperez at snf.stanford.edu Wed May 22 02:14:34 2002 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: May 22, 2002 2:14:34 PM Subject: Problem innotec 2002-05-17 20:10:14: front crystal failure Message-ID: From jhaydon at snf.stanford.edu Wed May 22 03:48:36 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 22, 2002 3:48:36 PM Subject: Comment innotec 2002-05-22 15:48:36: down for shield change on Friday afternoon Message-ID: From maurice at snf.stanford.edu Fri May 24 05:35:35 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 24, 2002 5:35:35 PM Subject: Shutdown innotec 2002-05-24 17:35:35: shielding being replaced: peeling Message-ID: Waiting for system coating and leakcheck. Should be up mid morning tues. From maurice at snf.stanford.edu Tue May 28 09:58:30 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: May 28, 2002 9:58:30 AM Subject: Shutdown innotec 2002-05-24 17:35:35: shielding being replaced: peeling Message-ID: Innotec has been coated with 1000A of Al. It is back up. From shimbo at snf.stanford.edu Thu May 30 07:08:46 2002 From: shimbo at snf.stanford.edu (shimbo at snf.stanford.edu) Date: May 30, 2002 7:08:46 PM Subject: Problem innotec 2002-05-30 19:08:46: Lost Telemark Power Message-ID: Part way through a deposition, the Telemark boxes abruptly lost power for no reason that was obviously apparent. The appropriate valves promptly closed off. I was depositing gold with a power of 12% and a rate of 2.1 A/sec. The pressure was holding steady at about 1.0e-6 Torr.