coat SiO2 in innotec

Bryan Lin lin_bryan at
Mon May 13 15:17:13 PDT 2002

Dear Innotec member:

       Is it possible to coat the SiO2 by Innotec if I buy SiO2 target

for it? I know Si can be deposited on Innotec. But, the

Si is semiconductor and SIO2 is insulator. Does anybody 

have experience for that.  I know PECVD and balzer can deposit

the SiO2, but I want to deposit SiO at low temperature environment.

Only the Innotec can serve for this purpose.

Thank you for your response in advanced.

Bryan Lin

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