coat SiO2 in innotec

[Bryan Lin]

Dear Innotec member:

       Is it possible to coat the SiO2 by Innotec if I buy SiO2 target

for it? I know Si can be deposited on Innotec. But, the

Si is semiconductor and SIO2 is insulator. Does anybody 

have experience for that.  I know PECVD and balzer can deposit

the SiO2, but I want to deposit SiO at low temperature environment.

Only the Innotec can serve for this purpose.

Thank you for your response in advanced.

Bryan Lin



---------------------------------
Do You Yahoo!?
LAUNCH - Your Yahoo! Music Experience
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec-pcs/attachments/20020513/bee40e30/attachment.html>