coat SiO2 in innotec

Dick Crane rcrane at
Mon May 13 15:44:42 PDT 2002


SiO2 will deposit nicely via e-beam evaporation and is rather straight
forward. SiO is difficult to e-beam evaporate. I have evaporated SiO
with a resistance heater successfully. SiO sublimes and tend to "pop",
so a baffled, enclosed box is needed.


Bryan Lin wrote:

> Dear Innotec member:
>        Is it possible to coat the SiO2 by Innotec if I buy SiO2 target
> for it? I know Si can be deposited on Innotec. But, the
> Si is semiconductor and SIO2 is insulator. Does anybody
> have experience for that.  I know PECVD and balzer can deposit
> the SiO2, but I want to deposit SiO at low temperature environment.
> Only the Innotec can serve for this purpose.
> Thank you for your response in advanced.
> Bryan Lin
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