Problem innotec 2002-05-30 19:08:46: Lost Telemark Power

shimbo at snf.stanford.edu shimbo at snf.stanford.edu
Thu May 30 07:08:46 PDT 2002


Part way through a deposition, the Telemark boxes abruptly
lost power for no reason that was obviously apparent.  The
appropriate valves promptly closed off.
I was depositing gold with a power of 12% and a rate of
2.1 A/sec.  The pressure was holding steady at about
1.0e-6 Torr.




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